Multi-layer pellicle membrane
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPei-Cheng Hsu, Ta-Cheng Lien, Hsin-Chang Lee, Tsai-Sheng Gau, Chin-Hsiang Lin
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Abstract
A pellicle assembly includes a pellicle membrane and a conformal coating on an outer surface of the pellicle membrane. The pellicle membrane can be formed with multiple layers and has a combination of high transmittance, low deflection, and small pore size. The conformal coating is intended to protect the pellicle membrane from damage that can occur due to heat and hydrogen plasma created during EUV exposure.
Claims20
A pellicle assembly, comprising:
- a pellicle membrane comprising at least a first nanotube membrane layer;
- and a conformal coating on the pellicle membrane that comprises ZrF4 YF, or HfF4.
A method for producing a reticle assembly comprising:
- mounting a pellicle assembly over a mask pattern on a reticle;
- wherein the pellicle assembly comprises a pellicle membrane having a conformal coating, wherein the pellicle membrane comprises at least a first nanotube membrane layer and wherein the conformal coating comprises ZrF4 YF, or HfF4.
A pellicle membrane, comprising at least a first nanotube membrane layer;
- and a conformal coating covering the first nanotube membrane layer that comprises ZrF4 YF, or HfF4.
Dependencies are inferred from the claim text.