C23C 18/168
Control of temperature
Official title: {Control of temperature, e.g. temperature of bath, substrate}
C23C18/168 (Control of temperature) appears on 70 US grants and 88 published applications in this corpus.
Search patents in C23C- Granted patents
- 70
- Published applications
- 88
- Assignees
- 60
- Inventors
- 265
- Latest grant
- 7 Oct 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 1 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 1 | 0 |
| 1986 | 2 | 0 |
| 1987 | 0 | 0 |
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 1 | 0 |
| 1996 | 0 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 1 | 0 |
| 2000 | 7 | 0 |
| 2001 | 0 | 2 |
| 2002 | 1 | 0 |
| 2003 | 1 | 2 |
| 2004 | 3 | 2 |
| 2005 | 2 | 6 |
| 2006 | 0 | 4 |
| 2007 | 2 | 4 |
| 2008 | 1 | 2 |
| 2009 | 0 | 1 |
| 2010 | 2 | 2 |
| 2011 | 1 | 3 |
| 2012 | 4 | 2 |
| 2013 | 2 | 3 |
| 2014 | 2 | 3 |
| 2015 | 2 | 10 |
| 2016 | 6 | 9 |
| 2017 | 5 | 3 |
| 2018 | 3 | 5 |
| 2019 | 2 | 3 |
| 2020 | 4 | 4 |
| 2021 | 2 | 4 |
| 2022 | 2 | 7 |
| 2023 | 2 | 3 |
| 2024 | 0 | 3 |
| 2025 | 5 | 0 |
| 2026 | 0 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Substrate liquid processing apparatus and substrate liquid processing method7 Oct 2025US 12,435,426 B2Tokyo Electron Limited
- Substrate processing apparatus and substrate processing method2 Sep 2025US 12,404,587 B2Tokyo Electron Limited
- Preparation method for iron-based alloy powder EBSD test sample17 Jun 2025US 12,332,155 B2Central South University
- Substrate liquid processing apparatus for supplying temperature-controlled plating liquid22 Apr 2025US 12,281,390 B2Tokyo Electron Limited
- Substrate processing apparatus and substrate processing method15 Apr 2025US 12,276,027 B2Tokyo Electron Limited
- Manufacturing method of rolled surface-treated steel sheet and rolled surface-treated steel sheet2 Jul 2026US 2026/0185235 A1Toyo Kohan Co.Ltd
- Apparatus for measuring plating deposition status22 Aug 2024US 2024/0279814 A1C. Uyemura & Co., Ltd.
- Depositing Station And Device For Generating Contact Metallizations4 Apr 2024US 2024/0110286 A1Pac Tech—Packaging Technologies GmbH
- Substrate liquid processing apparatus and substrate liquid processing method22 Feb 2024US 2024/0060186 A1Tokyo Electron Limited
- Electroless nickel or cobalt plating solution27 Jul 2023US 2023/0235462 A1Atotech Deutschland GmbH
Most cited
By later US patents
- Method of fabricating an interconnection element335US 6,336,269 B12002
- Method of modifying the thickness of a plating on a member by creating a temperature gradient on the member, applications for employing such a method, and structures resulting from such a method200US 6,110,823 AFormFactor, Inc. · 2000
- Apparatus for controlling plating over a face of a substrate120US 6,042,712 AFormFactor, Inc. · 2000
- Method and apparatus for controlling plating over a face of a substrate85US 6,090,261 AFormFactor, Inc. · 2000
- Microporous metal-plated polytetrafluoroethylene articles and method of manufacture55US 4,720,400 AW. L. Gore & Associates, Inc. · 1988