Apparatus for controlling plating over a face of a substrate
AssigneeFormFactor, Inc.
InventorGaetan L. Mathieu
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Abstract
According to one aspect of the invention, a plating system is provided which includes a tank for containing a plating solution, a substrate holder, and a temperature control device. The substrate holder is configured to support a substrate in position so that at least a first face of the substrate is exposed to the plating solution in the tank. The temperature control device provides selective control of temperature in various regions of the substrate during plating so as to control plating over the first face of the substrate.
Claims46
A plating system which includes:
- a tank for containing a plating solution;
- a substrate holder configured to support a substrate in position so that at least a first face of the substrate is exposed to the plating solution in the tank;
- and
- a temperature control device coupled to provide temperature control over the substrate and to create a temperature gradient over the first face of the substrate so as to control plating over the substrate and plate substantially uniformly over a substantial portion of the first face.
A method of plating on a substrate, the method including:
- exposing at least a first face of the substrate to a plating solution;
- and
- creating a temperature gradient over the substrate, the temperature gradient being created so as to plate substantially uniformly over a substantial portion of the first face.
A method of rigidifying a plurality of elongate components, each elongate component having an end which is connected to a first face of a substrate, the method including the steps of:
- plating a layer on each elongate component;
- and
- creating a temperature differential between groups of the elongate components.
A plating system which includes:
- a tank for containing a plating solution;
- a substrate holder configured to support a substrate in position so that at least a first face of the substrate is exposed to the plating solution in the tank;
- and
- at least first and second thermal bladders locatable on a second face of the substrate opposing the first face, each bladder having an inlet opening for allowing a temperature control medium into the bladder and an outlet opening for allowing the temperature control medium out of the bladder, the bladders being capable of providing temperature control over the substrate and creating a temperature gradient over the second face of the substrate thereby creating a temperature gradient over the first face of the substrate.
A method of plating on a substrate, the method including:
- exposing at least a first face of the substrate to a plating solution;
- and
- creating a temperature gradient over the substrate with at least first and second thermal bladders, each bladder having an inlet opening through which a temperature control medium enters the bladder and an outlet opening through which the temperature control medium exits from the bladder.
A method of forming a plurality of elongate resilient components, each elongate resilient component having an end which is connected to a first face of a substrate, the method comprising:
- plating a layer on each elongate resilient component;
- and
- creating a temperature differential between groups of the elongate components.
Dependencies are inferred from the claim text.