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C23C 16/308

Oxynitrides

Official title: {Oxynitrides}

C23C16/308 (Oxynitrides) appears on 512 US grants and 639 published applications in this corpus.

Search patents in C23C

Granted patents: 512
Published applications: 639
Assignees: 225
Inventors: 1,295
Latest grant: 25 Aug 2026

Filings by year

C23C 16/308: granted patents and published applications per publication year
Year	Granted patents	Published applications
1979	1	0
1980	0	0
1981	3	0
1982	2	0
1983	1	0
1984	1	0
1985	2	0
1986	2	0
1987	3	0
1988	1	0
1989	2	0
1990	6	0
1991	3	0
1992	4	0
1993	2	0
1994	1	0
1995	0	0
1996	1	0
1997	1	0
1998	1	0
1999	6	0
2000	7	0
2001	6	6
2002	8	14
2003	13	23
2004	19	17
2005	14	35
2006	9	22
2007	15	24
2008	17	29
2009	13	20
2010	23	18
2011	13	19
2012	11	18
2013	15	20
2014	17	26
2015	19	25
2016	20	25
2017	29	33
2018	20	29
2019	13	22
2020	31	39
2021	16	27
2022	27	37
2023	24	35
2024	21	38
2025	29	27
2026	20	11

By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.

Recent patents

Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium25 Aug 2026US 12,721,065 B2Kokusai Electric Corporation
Substantially carbon-free molybdenum-containing and tungsten-containing films in semiconductor device manufacturing11 Aug 2026US 12,703,911 B2Lam Research Corporation
Composition and methods using same for carbon doped silicon containing films21 Jul 2026US 12,690,400 B2Versum Materials US, LLC
Forming mesas on an electrostatic chuck21 Jul 2026US 12,690,419 B2APPLIED Materials.Inc.
Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium7 Jul 2026US 12,677,612 B2Kokusai Electric Corporation

Most cited

By later US patents