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US 12,690,419 B2Granted
Forming mesas on an electrostatic chuck
AssigneeApplied Materials, Inc.
InventorsWendell Glenn Boyd, Jr., Stanley Wu, Matthew Boyd
Life of this patent
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AssigneeApplied Materials, Inc.
InventorsWendell Glenn Boyd, Jr., Stanley Wu, Matthew Boyd
Estimating the term…
A body of an electrostatic chuck comprises mesas disposed on a polished surface of the body. Each of the mesas comprises an adhesion layer disposed on the polished surface of the body, a transition layer disposed over the adhesion layer, and a coating layer disposed over the transition layer. The coating layer has a hardness of at least 14 GPa. The body further comprises a sidewall coating disposed over a sidewall of the body. A method for preparing the body comprises polishing the surface of the body and cleaning the polished surface. The method further comprises depositing the mesas by depositing the adhesion layer on the body, the transition layer over the adhesion layer, and the coating layer over the transition layer. Further, the method includes, polishing the mesas.
A method for preparing a body of an electrostatic chuck, the method comprising:
A body of an electrostatic chuck, the body comprising:
An electrostatic chuck comprising:
Dependencies are inferred from the claim text.