C23C 16/276
Using plasma jets
Official title: {using plasma jets}
C23C16/276 (Using plasma jets) appears on 83 US grants and 38 published applications in this corpus.
Search patents in C23C- Granted patents
- 83
- Published applications
- 38
- Assignees
- 63
- Inventors
- 180
- Latest grant
- 30 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1984 | 1 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 2 | 0 |
| 1992 | 5 | 0 |
| 1993 | 3 | 0 |
| 1994 | 9 | 0 |
| 1995 | 5 | 0 |
| 1996 | 11 | 0 |
| 1997 | 6 | 0 |
| 1998 | 5 | 0 |
| 1999 | 5 | 0 |
| 2000 | 1 | 0 |
| 2001 | 4 | 0 |
| 2002 | 3 | 0 |
| 2003 | 1 | 0 |
| 2004 | 0 | 1 |
| 2005 | 0 | 1 |
| 2006 | 0 | 0 |
| 2007 | 1 | 0 |
| 2008 | 0 | 0 |
| 2009 | 0 | 0 |
| 2010 | 0 | 0 |
| 2011 | 0 | 0 |
| 2012 | 0 | 0 |
| 2013 | 0 | 0 |
| 2014 | 0 | 3 |
| 2015 | 0 | 3 |
| 2016 | 1 | 3 |
| 2017 | 3 | 3 |
| 2018 | 2 | 1 |
| 2019 | 2 | 3 |
| 2020 | 0 | 2 |
| 2021 | 2 | 5 |
| 2022 | 1 | 3 |
| 2023 | 3 | 2 |
| 2024 | 1 | 4 |
| 2025 | 2 | 1 |
| 2026 | 3 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Variable-temperature vapor deposition process30 Jun 2026US 12,668,872 B2Great Lakes Crystal Technologies, Inc.
- Arc-beam scanning for suppressing anode overgrowth in PICVD system19 May 2026US 12,633,502 B2Oerlikon Surface Solutions AG, PfäFfikon
- Arc-beam position monitoring and position control in PICVD coating systems17 Mar 2026US 12,577,671 B2Oerlikon Surface Solutions AG, PfäFfikon
- Device for forming diamond film etc. and method therefor12 Aug 2025US 12,385,130 B2Co-Growth Inc.
- Film and forming method thereof6 May 2025US 12,291,776 B2Changxin Memory Technologies, Inc.
- Patterned DLC Coating for High Temperature Electrostatic Chucks18 Jun 2026US 2026/0168083 A1
- Processing apparatus, lithography apparatus, repairing method, and article manufacturing method11 Jun 2026US 2026/0159943 A1Canon Kabushiki Kaisha
- Amorphous carbon coating method for rubber roller19 Feb 2026US 2026/0049395 A1INNOTION TECH Co., Ltd.
- Coatings on inner surfaces of particle containment chambers19 Jun 2025US 2025/0201529 A1Helion Energy, Inc.
- Arc-beam scanning for suppressing anode overgrowth in picvd system12 Sep 2024US 2024/0304425 A1Oerlikon Surface Solutions AG, PfäFfikon
Most cited
By later US patents
- Method for arc discharge plasma vapor deposition of diamond293US 5,368,897 AFujitsu Limited · 1994
- Apparatus for synthesizing diamond films utilizing an arc plasma264US 5,560,779 AOlin Corporation · 1996
- Method of depositing a carbon film on a substrate and products obtained thereby189US 4,486,286 ANerken Research Corp. · 1984
- Process for forming diamond coating using a silent discharge plasma jet process73US 5,104,634 AHercules Incorporated · 1992
- Apparatus for producing diamonds by chemical vapor deposition and articles produced therefrom57US 5,204,145 AGeneral Electric Company · 1993