Processing apparatus, lithography apparatus, repairing method, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsTOSHINAO TATSUNO, SHINJI FUKUI, KOHEI IMOTO
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Abstract
A processing apparatus for forming a diamond-like carbon film on a surface of a substrate support member, includes a head having an ejection hole configured to eject a raw material for forming the diamond-like carbon film, a driving mechanism configured to adjust a relative position between the substrate support member and the head, and a controller configured to control the driving mechanism so as to form the diamond-like carbon film at a target position of the substrate support member.
Claims20
A processing apparatus for forming a diamond-like carbon film on a surface of a substrate support member, comprising:
- a head having an ejection hole configured to eject a raw material for forming the diamond-like carbon film;
- a driving mechanism configured to adjust a relative position between the substrate support member and the head;
- and
- a controller configured to control the driving mechanism so as to form the diamond-like carbon film at a target position of the substrate support member.
A repairing method of repairing a substrate support member, comprising:
- measuring a shape of a surface of the substrate support member;
- and
- forming a diamond-like carbon film by a plasma at a target position decided based on the shape of the surface.
Dependencies are inferred from the claim text.