Device for forming diamond film etc. and method therefor
AssigneesNational University Corporation Ehime University, Co-Growth Inc.
InventorsHiromichi Toyota, Shinfuku Nomura, Toshiyuki Shimada
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AssigneesNational University Corporation Ehime University, Co-Growth Inc.
InventorsHiromichi Toyota, Shinfuku Nomura, Toshiyuki Shimada
Estimating the term…
According to an embodiment of the present invention, there is provided a device for forming at least a diamond film on a surface of a substrate, the device comprising: a container configured to hold a raw material liquid and to place the substrate in the raw material liquid; an electrode part comprising a positive electrode and a negative electrode and configured to generate a plasma in the raw material liquid; a raw material gas supply part and a carrier gas supply part, each of the raw material gas supply part and the carrier gas supply part being connected to the electrode part; and a power source configured to apply a voltage to the electrode part, wherein the power source is a direct current power source, and the electrode part further comprises an adjunctive member, and the adjunctive member is attached to an electrode at a plasma generation region of the electrode part.
A device for forming at least a diamond film on a surface of a substrate, the device comprising:
A method for forming at least a diamond film on a surface of a substrate, the method comprising:
Dependencies are inferred from the claim text.