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US 2024/0304425 A1Published application
Arc-beam scanning for suppressing anode overgrowth in picvd system
AssigneeOerlikon Surface Solutions AG, PfäFfikon
InventorOthmar ZÜGER
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Abstract
A method for suppressing anode overgrowth in an arc-beam PICVD coating system, wherein during at least part of a coating process of the arc-beam PICVD coating system, the arc-beam is scanned over at least part of a surface of the anode. Further, the invention relates to an arc-beam PICVD coating system for coating parts.
Claims10
A method for suppressing anode overgrowth in an arc-beam PICVD coating system, characterized in that during at least part of a coating process of the arc-beam PICVD coating system, the arc-beam is scanned over at least part of a surface of the anode.
Dependencies are inferred from the claim text.