US 5,560,779 A · Apparatus for synthesizing diamond films utilizing an arc plasma

Abstract

There is provided a system for the manufacture of a diamond film. A plasma generator generates a hydrogen atom containing plasma stream into which a hydrocarbon containing gas is fed. The plasma dissociates the hydrocarbon to carbon radicals and carbon which are deposited on a substrate where the carbon crystallizes to a diamond film. The efficiency of the system is increased by heating the hydrogen source gas prior to generation of the plasma. Other means to increase the effectiveness of the system include using a plurality of plasma streams and shaping the plasma stream, A low internal strain, high quality optical film is generated by depositing the carbon on a substrate supported by a heat sink having nonuniform thermal conductivity such that the thermal gradient across the surface of the heat sink is less than about 8.degree. C./centimeter.

Claims24

Dependent claims

A system for the deposition of a diamond film, comprising:

a) a hydrogen source gas;
b) a plasma generator for converting said hydrogen source gas to a plasma stream, said plasma generator including a cathode and an anode;
c) a plate abutting the downstream side of said anode having a plurality of first apertures of a first diameter and a plurality of second apertures of a second, lesser diameter interspersed between said first apertures, said first apertures diverging said plasma stream to a plurality of plasma streams;
d) a feed tube for introducing a hydrocarbon feed gas to said plasma stream;
and
e) a substrate disposed at a point where said plurality of plasma streams overlap to receive said diamond film.

3 more elements

Dependencies are inferred from the claim text.

Apparatus for synthesizing diamond films utilizing an arc plasma

Life of this patent

Apparatus for synthesizing diamond films utilizing an arc plasma

Life of this patent

Abstract

Claims24