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US 12,291,776 B2Granted
Film and forming method thereof
AssigneeChangxin Memory Technologies, Inc.
InventorXinlian Deng
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Abstract
Embodiments of the present disclosure provide a film and a forming method thereof. The forming method includes: providing a base; forming a diamond-like carbon film on the base, where the DLC film has carbon-hydrogen chemical bonds; and performing photocatalytic treatment on the DLC film, to break at least some of the carbon-hydrogen chemical bonds and reduce content of hydrogen elements in the DLC film.
Claims15
A method of forming a film, comprising:
- providing a base;
- forming a diamond-like carbon film on the base, wherein the diamond-like carbon film has a carbon-hydrogen chemical bond;
- and
- performing photocatalytic treatment on the diamond-like carbon film, to break at least some of the carbon-hydrogen chemical bonds and reduce content of hydrogen elements in the diamond-like carbon film;
- and,
- wherein the process parameters of the photocatalytic treatment comprise:
- a light wavelength range of 200 nanometers to 400 nanometers, a process time length of 3 minutes to 8 minutes, and a process temperature of 15 degree Celsius to 60 degree Celsius.
4 more elements
Dependencies are inferred from the claim text.