Patterned DLC Coating for High Temperature Electrostatic Chucks

Abstract

A method of preparing an electrostatic platen is disclosed. At high temperatures, some low friction coatings, such as diamond like carbon (DLC), become conductive. The methods described allow the deposition of a limited amount of DLC to those regions of the electrostatic platen that contact the workpiece. By limiting the amount of DLC applied to the electrostatic platen, the clamping force experienced by the workpiece is minimally affected by the increased conductivity of the DLC at elevated temperatures. The DLC is applied to embossments that extend upward from the flat surface of the electrostatic platen.

Dependencies are inferred from the claim text.