Arc-beam scanning for suppressing anode overgrowth in PICVD system
AssigneeOerlikon Surface Solutions AG, PfäFfikon
InventorOthmar Züger
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Abstract
A method for suppressing anode overgrowth in an arc-beam PICVD coating system, wherein during at least part of a coating process of the arc-beam PICVD coating system, the arc-beam is scanned over at least part of a surface of the anode. Further, the invention relates to an arc-beam PICVD coating system for coating parts.
Claims8
A method for suppressing anode overgrowth in an arc-beam PICVD coating system, wherein during at least part of a coating process of the arc-beam PICVD coating system, the arc-beam is scanned over at least part of a surface of the anode, wherein the scanning of the arc-beam is controlled by a magnetic field, and wherein at least a strength or a direction of the magnetic field is set based on an expected growth of an insulating layer on the anode.
Dependencies are inferred from the claim text.