C23C 14/56
Apparatus specially adapted for continuous coating
Official title: Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
C23C14/56 (Apparatus specially adapted for continuous coating) appears on 3,046 US grants and 3,565 published applications in this corpus.
Search patents in C23C- Granted patents
- 3,046
- Published applications
- 3,565
- Assignees
- 1,210
- Inventors
- 7,260
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 12 | 0 |
| 1977 | 15 | 0 |
| 1978 | 2 | 0 |
| 1979 | 3 | 0 |
| 1980 | 14 | 0 |
| 1981 | 16 | 0 |
| 1982 | 12 | 0 |
| 1983 | 19 | 0 |
| 1984 | 16 | 0 |
| 1985 | 27 | 0 |
| 1986 | 10 | 0 |
| 1987 | 25 | 0 |
| 1988 | 18 | 0 |
| 1989 | 36 | 0 |
| 1990 | 32 | 0 |
| 1991 | 25 | 0 |
| 1992 | 31 | 0 |
| 1993 | 49 | 0 |
| 1994 | 43 | 0 |
| 1995 | 44 | 0 |
| 1996 | 40 | 0 |
| 1997 | 69 | 0 |
| 1998 | 62 | 0 |
| 1999 | 75 | 0 |
| 2000 | 116 | 0 |
| 2001 | 119 | 68 |
| 2002 | 108 | 91 |
| 2003 | 84 | 113 |
| 2004 | 77 | 117 |
| 2005 | 64 | 131 |
| 2006 | 33 | 128 |
| 2007 | 44 | 139 |
| 2008 | 36 | 136 |
| 2009 | 53 | 159 |
| 2010 | 80 | 177 |
| 2011 | 78 | 202 |
| 2012 | 104 | 168 |
| 2013 | 96 | 171 |
| 2014 | 111 | 187 |
| 2015 | 125 | 152 |
| 2016 | 103 | 121 |
| 2017 | 110 | 148 |
| 2018 | 95 | 129 |
| 2019 | 69 | 139 |
| 2020 | 113 | 139 |
| 2021 | 71 | 142 |
| 2022 | 86 | 182 |
| 2023 | 104 | 136 |
| 2024 | 113 | 146 |
| 2025 | 106 | 85 |
| 2026 | 53 | 59 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Coating module with improved cathode arrangement6 Oct 2026US 12,753,489 B2Singulus Technologies AG
- Structures and methods for processing a semiconductor substrate22 Sep 2026US 12,742,237 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Particle reduction in physical vapor deposition of amorphous silicon1 Sep 2026US 12,723,304 B2APPLIED Materials.Inc.
- Shutter disk system1 Sep 2026US 12,723,305 B2APPLIED Materials.Inc.
- Surface treatment apparatus25 Aug 2026US 12,719,023 B2Shibaura Machine Co., Ltd.
- Tco coating method, tco coating device, and solar cell and preparation method therefor8 Oct 2026US 2026/0314105 A1Tongwei Solar (Chengdu) Co., Ltd.
- A method of manufacturing a component for a matrix-array force sensor and roll-to-roll apparatus to carry out the same24 Sep 2026US 2026/0286496 A1Peratech IP Ltd
- Vacuum coating system24 Sep 2026US 2026/0286507 A1
- Methods and systems for continuous roll-to-roll manufacturing of photovoltaic structures17 Sep 2026US 2026/0282592 A1Energy Materials Corporation
- Gradient Coating Apparatus10 Sep 2026US 2026/0267055 A1Envisics Ltd
Most cited
By later US patents
- Low pressure vapor phase deposition of organic thin films1,502US 6,337,102 B12002
- Modular wafer transport and processing system655US 4,917,556 AVarian Associates, Inc. · 1990
- Film forming apparatus capable of preventing adhesion of film deposits590US 5,065,698 ACanon Kabushiki Kaisha · 1991
- Process chamber sleeve with ring seals for isolating individual process modules in a common cluster571US 5,667,592 AGaSonics International · 1997
- Perimeter partition-valve with protected seals and associated small size process chambers and multiple chamber systems529US 7,682,454 B2Sundew Technologies, LLC · 2010