Methods and systems for continuous roll-to-roll manufacturing of photovoltaic structures
AssigneeEnergy Materials Corporation
InventorsStephan J. DeLuca, Thomas Nathaniel Tombs
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Abstract
A method of making a photovoltaic structure by roll-to-roll manufacturing includes conveying a continuous substrate from a dispensing roll at ambient pressure to a reduced pressure metal oxide deposition station, depositing a metal oxide layer over the continuous substrate under reduced pressure, and transporting the continuous substrate having the metal oxide layer to a take up roll at ambient pressure, wherein the continuous substrate extends continuously from the dispensing roll to the take up roll.
Claims43
A method of making a photovoltaic structure by roll-to-roll manufacturing, the method comprising conveying a continuous substrate from a dispensing roll at ambient pressure to a reduced pressure metal oxide deposition station, depositing a metal oxide layer over the continuous substrate under reduced pressure, and transporting the continuous substrate having the metal oxide layer to a take up roll at ambient pressure, wherein the continuous substrate extends continuously from the dispensing roll to the take up roll.
Dependencies are inferred from the claim text.