Shutter disk system
AssigneeApplied Materials, Inc.
InventorsThomas Brezoczky, Kirankumar Neelasandra Savandaiah, Arun Rengaraj, Sivakumar Ramalingam
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AssigneeApplied Materials, Inc.
InventorsThomas Brezoczky, Kirankumar Neelasandra Savandaiah, Arun Rengaraj, Sivakumar Ramalingam
Estimating the term…
The present disclosure provides shutter disk systems. The shutter disk systems include a body including a plurality of faces, a base, and a top. The body includes an interior volume. The interior volume includes an interlock region configured to receive at least one shutter disk. The interior volume includes an operation region adjacent to the interlock region, where the operational region is separate from the interlock region by an isolator plate. A shutter disk stack is disposed in the operational region. The shutter disk stack includes at least a storage rack configured to receive two or more shutter disks. A first door is disposed on a face of the plurality of faces proximal to the operational region. A second door is disposed proximal to the interlock region. A third door is disposed proximal to a portion of the interlock region and a portion of the operational region.
A shutter disk system, comprising:
A substrate processing system, comprising:
Dependencies are inferred from the claim text.