C23C 14/022
By means of bombardment with energetic particles or radiation
Official title: {by means of bombardment with energetic particles or radiation}
C23C14/022 (By means of bombardment with energetic particles or radiation) appears on 618 US grants and 679 published applications in this corpus.
Search patents in C23C- Granted patents
- 618
- Published applications
- 679
- Assignees
- 479
- Inventors
- 1,839
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 0 | 0 |
| 1978 | 1 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 5 | 0 |
| 1982 | 4 | 0 |
| 1983 | 2 | 0 |
| 1984 | 3 | 0 |
| 1985 | 6 | 0 |
| 1986 | 5 | 0 |
| 1987 | 3 | 0 |
| 1988 | 3 | 0 |
| 1989 | 6 | 0 |
| 1990 | 10 | 0 |
| 1991 | 9 | 0 |
| 1992 | 9 | 0 |
| 1993 | 6 | 0 |
| 1994 | 11 | 0 |
| 1995 | 12 | 0 |
| 1996 | 11 | 0 |
| 1997 | 10 | 0 |
| 1998 | 14 | 0 |
| 1999 | 10 | 0 |
| 2000 | 28 | 0 |
| 2001 | 16 | 4 |
| 2002 | 15 | 23 |
| 2003 | 12 | 16 |
| 2004 | 20 | 29 |
| 2005 | 13 | 27 |
| 2006 | 9 | 19 |
| 2007 | 8 | 23 |
| 2008 | 7 | 16 |
| 2009 | 7 | 30 |
| 2010 | 13 | 15 |
| 2011 | 16 | 22 |
| 2012 | 11 | 60 |
| 2013 | 30 | 19 |
| 2014 | 21 | 25 |
| 2015 | 11 | 20 |
| 2016 | 14 | 32 |
| 2017 | 15 | 24 |
| 2018 | 21 | 36 |
| 2019 | 17 | 28 |
| 2020 | 26 | 43 |
| 2021 | 27 | 37 |
| 2022 | 21 | 37 |
| 2023 | 24 | 38 |
| 2024 | 27 | 22 |
| 2025 | 29 | 23 |
| 2026 | 18 | 11 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
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Most cited
By later US patents
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- Method for front end of line fabrication265US 7,396,480 B2APPLIED Materials.Inc. · 2008
- Method of forming cubic boron nitride films242US 5,483,920 ABoard of Governors of Wayne State University · 1996
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