Surface pre-oxidized AlCrVTiSiON nano-gradient coating and preparation method thereof

A method for preparing surface oxygenated AlCrVTiSiON nano-gradient coatings, the surface oxygenated AlCrVTiSiON nano-gradient coating being deposited on a metal or silicon substrate, having an oxygen content that gradually increases from inside to outside, and having a coating surface comprising a protective layer of AlCrVTiSiON oxide, wherein:

• the AlCrVTiSiON nano-gradient coating is deposited on a substrate by an arc ion plating process;
• the V content of the AlCrVTiSiON nano-gradient coating is controlled by linear adjustment of a V target current, and the AlCrVTiSiON nano-gradient coating is formed by surface oxygenation;
• wherein targets utilized for the arc ion plating process are selected from:
• AlCrSi, AlTiSi alloy and V target and Cr target;
• a metal compound CrN transition layer is deposited on the substrate for 15~20 min, and then an AlCrVTiSiN functional layer is deposited and surface oxygenated;
• during deposition of the AlCrVTiSiN functional layer and surface oxygenation, a background vacuum is above 3×10−3 Pa, a bias is −100~−110 V, a duty cycle of 50%~60%, a deposition pressure is 2.8-2.9 Pa, and the AlCrSi target, AlTiSi target and V target are utilized;
• the target currents of the AlCrSi and AlTiSi targets are kept constant, the range of the AlCrSi target current is 95-100 A, and the range of AlTiSi target current is 80-85 A;
• wherein the V target current increases linearly from a lower limit of 75 A to an upper limit of 95 A, utilizing Ar and N2;
• wherein, according to a thickness of a required AlCrVTiSiON nano-gradient coating and the target current, a set time is utilized for the currents, the targets and for a gas inlet, and oxygen is injected into the AlCrVTiSiN functional layer within the last 5-20 minutes of deposition to implement surface oxygenation to form the AlCrVTiSiON nano-gradient coating.