C23C 14/021
Cleaning or etching treatments
Official title: {Cleaning or etching treatments}
C23C14/021 (Cleaning or etching treatments) appears on 892 US grants and 1,058 published applications in this corpus.
Search patents in C23C- Granted patents
- 892
- Published applications
- 1,058
- Assignees
- 673
- Inventors
- 2,830
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 4 | 0 |
| 1977 | 0 | 0 |
| 1978 | 2 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 5 | 0 |
| 1982 | 4 | 0 |
| 1983 | 2 | 0 |
| 1984 | 5 | 0 |
| 1985 | 7 | 0 |
| 1986 | 9 | 0 |
| 1987 | 6 | 0 |
| 1988 | 4 | 0 |
| 1989 | 7 | 0 |
| 1990 | 10 | 0 |
| 1991 | 11 | 0 |
| 1992 | 11 | 0 |
| 1993 | 9 | 0 |
| 1994 | 13 | 0 |
| 1995 | 15 | 0 |
| 1996 | 18 | 0 |
| 1997 | 15 | 0 |
| 1998 | 16 | 0 |
| 1999 | 11 | 0 |
| 2000 | 31 | 0 |
| 2001 | 19 | 5 |
| 2002 | 21 | 30 |
| 2003 | 15 | 16 |
| 2004 | 22 | 35 |
| 2005 | 16 | 29 |
| 2006 | 10 | 24 |
| 2007 | 9 | 27 |
| 2008 | 8 | 22 |
| 2009 | 7 | 34 |
| 2010 | 16 | 24 |
| 2011 | 19 | 26 |
| 2012 | 13 | 83 |
| 2013 | 36 | 30 |
| 2014 | 26 | 31 |
| 2015 | 20 | 33 |
| 2016 | 23 | 51 |
| 2017 | 24 | 44 |
| 2018 | 29 | 57 |
| 2019 | 29 | 51 |
| 2020 | 43 | 65 |
| 2021 | 45 | 65 |
| 2022 | 38 | 78 |
| 2023 | 41 | 57 |
| 2024 | 60 | 68 |
| 2025 | 60 | 47 |
| 2026 | 28 | 26 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Method for forming robust hydrophobic surfaces on steel workpiece6 Oct 2026US 12,753,490 B2Hong Kong Applied Science and Technology Research Institute Company Limited
- Surface-coated cutting tool29 Sep 2026US 12,746,604 B2Mitsubishi Materials Corporation
- Surface pre-oxidized AlCrVTiSiON nano-gradient coating and preparation method thereof22 Sep 2026US 12,742,236 B2
- Method of operating a PVD apparatus22 Sep 2026US 12,745,577 B2SPTS Technologies Limited
- Metallic coating process for combustor panels using a barrel configuration1 Sep 2026US 12,723,302 B2Rtx Corporation
- Productive coating process for a steel sheet and corresponding equipment8 Oct 2026US 2026/0308746 A1
- Razor blade comprising parylene c and parylene n1 Oct 2026US 2026/0295877 A1BIC Violex Single Member S.A.
- Razor blade comprising a parylene and titanium1 Oct 2026US 2026/0295878 A1BIC Violex Single Member S.A.
- Fabrication method of high-aspect-ratio double-layer diamond nanostructure17 Sep 2026US 2026/0275574 A1Institute of Physics, Chinese Academy of Sciences
- Biomimetic transparent nanoplasmonic meshes by reverse-nanoimprint lithography3 Sep 2026US 2026/0259354 A1
Most cited
By later US patents
- Reactor system for sublimation of pre-clean byproducts and method thereof449US 10,053,774 B2ASM IP Holding B. V. · 2018
- Apparatus for forming a thin film on surface of semiconductor substrate417US 5,174,881 AMitsubishi Denki Kabushiki Kaisha · 1992
- Method of forming a thin film on surface of semiconductor substrate369US 5,407,867 AMitsubishki Denki Kabushiki Kaisha · 1995
- Method for front end of line fabrication265US 7,396,480 B2APPLIED Materials.Inc. · 2008
- Method of forming cubic boron nitride films242US 5,483,920 ABoard of Governors of Wayne State University · 1996