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US 12,649,854 B2Granted
Method of preparing laminate and laminate for optical use
AssigneeLuminaMask Co., Ltd.
InventorsTaewan Kim, GeonGon Lee, Suk Young Choi, Hyung-joo Lee, Suhyeon Kim, Sung Hoon Son, Seong Yoon Kim, Min Gyo Jeong, HaHyeon Cho, Inkyun Shin
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Abstract
The method of preparing a laminate includes: preparing a process target, which is a laminate before being processed, where a light-shielding film has been disposed; and preparing a cleaned laminate through a first cleaning including applying UV rays and carbonated water to the process target, wherein the light-shielding film includes a transition metal and an element selected from the group consisting of oxygen, nitrogen, and carbon.
Claims7
A laminate where a light-shielding film is disposed,
- wherein the light-shielding film comprises a transition metal and an element selected from the group consisting of oxygen, nitrogen, and carbon, and
- wherein a reflectance of the light-shielding film is 35% or less with respect to a light having a wavelength of 193 nm,
- wherein the laminate comprises residual ions measured by ion chromatography, and wherein the residual ions comprise sulfur-based ions and nitric acid-based ions, and
- wherein the residual ions comprise sodium ions, phosphoric acid ions, potassium ions, magnesium ions and calcium ions, and a sum of an amount of the sodium ions, an amount of the phosphoric acid ions, an amount of the potassium ions, an amount of the magnesium ions, and an amount of the calcium ions is equal to or more than 0 ng/cm2 and less than or equal to 0.01 ng/cm2.
1 more element
Dependencies are inferred from the claim text.