C23C 14/0057
Using reactive gases other than o2, h2o, n2, nh3 or ch4
Official title: {using reactive gases other than O2, H2O, N2, NH3 or CH4}
C23C14/0057 (Using reactive gases other than o2, h2o, n2, nh3 or ch4) appears on 216 US grants and 247 published applications in this corpus.
Search patents in C23C- Granted patents
- 216
- Published applications
- 247
- Assignees
- 191
- Inventors
- 663
- Latest grant
- 18 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 2 | 0 |
| 1979 | 0 | 0 |
| 1980 | 1 | 0 |
| 1981 | 1 | 0 |
| 1982 | 1 | 0 |
| 1983 | 0 | 0 |
| 1984 | 2 | 0 |
| 1985 | 5 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 2 | 0 |
| 1989 | 2 | 0 |
| 1990 | 0 | 0 |
| 1991 | 1 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 2 | 0 |
| 1995 | 1 | 0 |
| 1996 | 7 | 0 |
| 1997 | 4 | 0 |
| 1998 | 4 | 0 |
| 1999 | 4 | 0 |
| 2000 | 3 | 0 |
| 2001 | 8 | 6 |
| 2002 | 10 | 3 |
| 2003 | 6 | 10 |
| 2004 | 6 | 2 |
| 2005 | 5 | 9 |
| 2006 | 2 | 4 |
| 2007 | 1 | 5 |
| 2008 | 0 | 4 |
| 2009 | 7 | 7 |
| 2010 | 2 | 9 |
| 2011 | 6 | 8 |
| 2012 | 6 | 20 |
| 2013 | 6 | 12 |
| 2014 | 9 | 11 |
| 2015 | 8 | 8 |
| 2016 | 4 | 6 |
| 2017 | 4 | 14 |
| 2018 | 7 | 12 |
| 2019 | 9 | 15 |
| 2020 | 6 | 12 |
| 2021 | 8 | 24 |
| 2022 | 11 | 13 |
| 2023 | 15 | 15 |
| 2024 | 10 | 8 |
| 2025 | 12 | 9 |
| 2026 | 6 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Variable hardness nanocomposite coating18 Aug 2026US 12,709,794 B2Southwest Research Institute
- Film formation apparatus and film formation method of gallium nitride film11 Aug 2026US 12,703,910 B2Japan Display Inc.
- Semiconductor processing equipment part and method for making the same14 Apr 2026US 12,604,683 B2Dah Young Vacuum Equipment Co., Ltd.
- Manufacturing method of gallium nitride film17 Feb 2026US 12,553,121 B2Japan Display Inc.
- Method for forming an LiCoO2 film and device for carrying out same17 Feb 2026US 12,553,122 B2
- Mirror layer and mirror for a lithographic apparatus2 Apr 2026US 2026/0093060 A1ASML Netherlands B. V.
- Optical filter, sensor system comprising same, and method for manufacturing halogenated amorphous silicon thin film for optical filter25 Dec 2025US 2025/0389869 A1
- Metal-fluoride thin films and deposition methods27 Nov 2025US 2025/0361606 A1
- Semiconductor film, and method for producing semiconductor film3 Jul 2025US 2025/0220975 A1Idemitsu Kosan Co., Ltd.
- Method for producing an optical layer system, and an optical layer system produced therewith29 May 2025US 2025/0171888 A1Fhr Anlagenbau GmbH
Most cited
By later US patents
- Endocurietherapy293US 5,342,283 A1994
- Thin-film solar cells205US 6,974,976 B2Miasole · 2005
- Electrophotographic photosensitive member and process for production thereof161US 4,265,991 ACanon Kabushiki Kaisha · 1981
- Manufacturing method for large-scale production of thin-film solar cells113US 7,544,884 B2Miasole · 2009
- Endocurietherapy98US 6,099,457 AEndotech, Inc. · 2000