B81C 2203/051
Active alignment
Official title: Active alignment, e.g. using internal or external actuators, magnets, sensors, marks or marks detectors
B81C2203/051 (Active alignment) appears on 66 US grants and 80 published applications in this corpus.
Search patents in B81C- Granted patents
- 66
- Published applications
- 80
- Assignees
- 64
- Inventors
- 154
- Latest grant
- 14 Jul 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2000 | 1 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 2 |
| 2003 | 2 | 2 |
| 2004 | 0 | 2 |
| 2005 | 2 | 4 |
| 2006 | 2 | 9 |
| 2007 | 0 | 1 |
| 2008 | 5 | 7 |
| 2009 | 4 | 5 |
| 2010 | 11 | 9 |
| 2011 | 4 | 2 |
| 2012 | 3 | 3 |
| 2013 | 2 | 3 |
| 2014 | 0 | 1 |
| 2015 | 3 | 1 |
| 2016 | 5 | 0 |
| 2017 | 1 | 4 |
| 2018 | 3 | 1 |
| 2019 | 2 | 3 |
| 2020 | 1 | 2 |
| 2021 | 1 | 2 |
| 2022 | 3 | 4 |
| 2023 | 3 | 2 |
| 2024 | 2 | 4 |
| 2025 | 3 | 4 |
| 2026 | 3 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Systems and methods for fabricating a 2D-material-based quantum sensor chip14 Jul 2026US 12,685,199 B2Toyota Jidosha Kabushiki Kaisha
- Package structure, apparatus and forming methods thereof26 May 2026US 12,641,370 B2xMEMS Labs, Inc.
- Method and arrangement for assembly of microchips into a separate substrate6 Jan 2026US 12,515,947 B2Sensible Holding B.V.
- Lensless near-contact imaging system for micro assembly18 Nov 2025US 12,477,237 B2Xerox Corporation
- Process and apparatus for the preparation of a bonded substrate14 Oct 2025US 12,441,608 B2Sherkin Technologies Limited
- Bonding pillar structure for hidden comb microelectromechanical system17 Sep 2026US 2026/0280449 A1Lumentum Operations LLC
- Lensless near-contact imaging system for micro assembly12 Mar 2026US 2026/0075327 A1Genesee Valley Innovations, LLC
- Forming methods of package structure and apparatus12 Mar 2026US 2026/0075366 A1xMEMS Labs, Inc.
- Lensless near-contact imaging system for micro assembly5 Jun 2025US 2025/0184623 A1Palo Alto Research Center Incorporated
- Membrane Device Fabrication1 May 2025US 2025/0136437 A1X-FAB Global Services GmbH
Most cited
By later US patents
- Method of manufacturing vibrating micromechanical structures43US 7,406,761 B2Honeywell International Inc. · 2008
- Method for making a module including a microplatform24US 6,569,754 B2The Regents of the University of Michigan · 2003
- Module and method of making same22US 6,667,558 B2The Regents of the University of Michigan · 2003
- Vibrating beam accelerometer20US 7,024,934 B2Honeywell International Inc. · 2006
- Vibrating beam accelerometer two-wafer fabrication process18US 6,938,334 B2Honeywell International Inc. · 2005