Lensless near-contact imaging system for micro assembly
AssigneeXerox Corporation
InventorsPatrick Yasuo Maeda, Jeng Ping Lu, Eugene Chow
Life of this patent
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Abstract
A machine vision system and method use lensless near-contact imaging with coherent illumination, or incoherent illumination, and high pixel count large format sensors (e.g., equivalent to at least 20 to 65 mega-pixels) to produce diffraction patterns of the micro-objects or the gray scale images of the micro-objects over a large overall field-of-view of the machine vision system. The machine vision system provides feedback to a microassembler system to position, orient, and assemble microscale devices like micro-LEDs over large working areas. The effective resolution of the machine vision system can be further improved through the use of gray scale and super-resolution image processing techniques.
Claims20
A method for operating a machine vision system suitable for use with a microassembler system for inspection of assembly of micro-objects on a planar working surface, the method comprising:
- arranging an array of lensless near-contact image-capture modules (LNCIM) vertically proximate to a working optical inspection region on a planar working surface of a transparent substrate, wherein each LNCIM having a high pixel-count large format image sensor (image sensor) vertically proximate and near-contact to and facing the planar working surface and being associated with a LNCIM field-of-view (FOV) region on the planar working surface;
- arranging one or more illumination light sources, optically coupled to respective one or more source optical trains, located and directed to pass and emit illumination light, in a defined wavelength range in a near infrared wavelength range, from the one or more source optical trains toward the planar working surface of the transparent substrate, the one or more illumination light sources optically coupled to respective one or more source optical trains being located on one side of the transparent substrate and the array of lensless near-contact image-capture modules being located on an opposite side of the transparent substrate;
- selectively turning ON the one or more illumination light sources optically coupled to the respective one or more source optical trains thereby preferentially passing and directing emitted electromagnetic radiation (light) in the defined wavelength range in the near infrared wavelength range to illuminate the working optical inspection region on the planar working surface;
- receiving, by the image sensor of each LNCIM in the array while the illumination light source is ON, light signals from each LNCIM FOV region associated with each respective image sensor of an LNCIM in the array, wherein received light signals from a micro-object disposed in a LNCIM FOV region on the planar working surface comprise a diffraction pattern received by the associated image sensor of an LNCIM in the array;
- capturing, by the image sensor of each LNCIM in the array, a LNCIM-captured image of the light signals received from the associated LNCIM FOV region on the planar working surface, wherein the LNCIM-captured image being associated with a LNCIM-captured image resolution;
- adjusting the LNCIM-captured image of at least one LNCIM in the array;
- detecting at least one diffraction pattern in the LNCIM-captured image associated with an LNCIM FOV region on the planar working surface, the at least one diffraction pattern corresponding to at least one micro-object disposed in the LNCIM FOV region;
- utilizing image processing of the diffraction pattern to determine at least one of a type, location, centroid, horizontal orientation, or vertical orientation, of the at least one micro-object;
- comparing the detected diffraction pattern in the LNCIM-captured image to models of diffraction patterns associated with features of known micro-objects;
- identifying, based on the comparing, at least one of a location, a horizontal orientation, a vertical orientation, a centroid, or a type, of a micro-object in the LNCIM FOV region associated with the LNCIM-captured image;
- and
- generating, based on the identifying, captured-image data associated with the identified at least one of a location, horizontal orientation, vertical orientation, centroid, or type, of the at least one micro-object disposed in the LNCIM FOV region, for providing the captured-image data to a microassembler system.
A method for operating a machine vision system suitable for use with a microassembler system for inspection of assembly of micro-objects on a planar working surface, the method comprising:
- arranging an array of lensless near-contact image-capture modules (LNCIM) below a transparent substrate and vertically proximate to a working optical inspection region on a planar working surface of the transparent substrate, wherein each LNCIM having a high pixel-count large format image sensor (image sensor), with an optical filter interposed between the image sensor and the transparent substrate, vertically proximate and near-contact to and facing the planar working surface and being associated with a LNCIM field-of-view (FOV) region on the planar working surface;
- arranging one or more visible light projectors, optically coupled to respective one or more source optical trains, located above the transparent substrate and directed to project visible light, in a defined wavelength range, toward the planar working surface of the transparent substrate;
- arranging one or more coherent illumination light sources, optically coupled to respective one or more source optical trains, located above the transparent substrate and directed to pass and emit illumination light, in a defined wavelength range in a near infrared wavelength range, from the one or more source optical trains toward the planar working surface of the transparent substrate;
- selectively turning ON the one or more illumination light sources optically coupled to the respective one or more source optical trains thereby preferentially passing and directing emitted electromagnetic radiation (coherent illumination light) in the defined wavelength range in the near infrared wavelength range to illuminate the working optical inspection region on the planar working surface;
- selectively turning ON the one or more visible light projectors thereby projecting light signals and dynamic image patterns on the planar working surface, the optical filters reducing an intensity of the light signals, projected from the projectors, that are outside of the defined wavelength range in the near infrared wavelength range and that can be incident on the face of the image sensors of the respective LNCIM's in the LNCIM array;
- receiving, by the image sensor of each LNCIM in the array while the coherent illumination light source is ON, light signals from each LNCIM FOV region associated with each respective image sensor of an LNCIM in the array, wherein received light signals from a micro-object disposed in a LNCIM FOV region on the planar working surface comprise a diffraction pattern received by the associated image sensor of an LNCIM in the array;
- capturing, by the image sensor of each LNCIM in the array, a LNCIM-captured image of the light signals received from the associated LNCIM FOV region on the planar working surface, wherein the LNCIM-captured image being associated with a LNCIM-captured image resolution;
- detecting at least one diffraction pattern in the LNCIM-captured image associated with an LNCIM FOV region on the planar working surface, the at least one diffraction pattern corresponding to at least one micro-object disposed in the LNCIM FOV region;
- performing image processing of the diffraction pattern thereby determining and identifying at least one of a type, location, centroid, horizontal orientation, or vertical orientation, of the at least one micro-object;
- and
- generating, based on the determining and identifying, captured-image data associated with the identified at least one of a location, horizontal orientation, vertical orientation, centroid, or type, of the at least one micro-object disposed in the LNCIM FOV region, for providing feedback including the captured-image data to a microassembler system in a micro-assembly process.
Dependencies are inferred from the claim text.