B81C 2201/014
By depositing an etch stop layer
Official title: by depositing an etch stop layer, e.g. silicon nitride, silicon oxide, metal
B81C2201/014 (By depositing an etch stop layer) appears on 254 US grants and 258 published applications in this corpus.
Search patents in B81C- Granted patents
- 254
- Published applications
- 258
- Assignees
- 131
- Inventors
- 576
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 2 | 0 |
| 1996 | 2 | 0 |
| 1997 | 0 | 0 |
| 1998 | 5 | 0 |
| 1999 | 5 | 0 |
| 2000 | 7 | 0 |
| 2001 | 4 | 4 |
| 2002 | 6 | 8 |
| 2003 | 11 | 7 |
| 2004 | 6 | 10 |
| 2005 | 3 | 9 |
| 2006 | 8 | 10 |
| 2007 | 9 | 4 |
| 2008 | 8 | 6 |
| 2009 | 2 | 12 |
| 2010 | 7 | 11 |
| 2011 | 7 | 8 |
| 2012 | 9 | 5 |
| 2013 | 5 | 9 |
| 2014 | 12 | 13 |
| 2015 | 11 | 10 |
| 2016 | 13 | 18 |
| 2017 | 14 | 18 |
| 2018 | 13 | 8 |
| 2019 | 16 | 11 |
| 2020 | 9 | 9 |
| 2021 | 10 | 11 |
| 2022 | 7 | 8 |
| 2023 | 7 | 19 |
| 2024 | 11 | 14 |
| 2025 | 11 | 7 |
| 2026 | 12 | 9 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
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- Micromechanical arm array for mems actuators8 Oct 2026US 2026/0307981 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Method for producing a microelectromechanical device comprising a cap structure and a microelectromechanical device8 Oct 2026US 2026/0307983 A1
- Method for producing a micromechanical layer structure with high aspect ratio and micromechanical layer structure21 May 2026US 2026/0138867 A1
- Method of fabricating micro-electro-mechanical system (mems) device30 Apr 2026US 2026/0116744 A1Vanguard International Semiconductor Corporation
- Mems and nems structures23 Apr 2026US 2026/0109596 A1Obsidian Sensors, Inc.
Most cited
By later US patents
- Lithography device for semiconductor circuit pattern generator287US 7,242,012 B2Elm Technology Corporation · 2007
- Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters171US 5,798,042 AThe Regents of the University of California · 1998
- Micromachined capsules having porous membranes and bulk supports115US 5,770,076 AThe Regents of the University of California · 1998
- Capacitive surface micromachined differential pressure sensor112US 5,332,469 AFord Motor Company · 1994
- Micromachined porous membranes with bulk support108US 5,985,328 AThe Regents of the University of California · 1999