Method of fabricating micro-electro-mechanical system (mems) device

Abstract

A method of fabricating a micro-electro-mechanical system (MEMS) device, the steps include: providing a supporting substrate; etching the supporting substrate to form a trench, where the trench surrounds a portion of the supporting substrate; forming a liner in the trench; filling up the trench with a filling material to form a stopper, wherein the stopper comprises the liner and the filling material; forming a MEMS structure on the stopper and the supporting substrate, wherein the MEMS structure includes a through hole; and etching a portion of the supporting substrate to form a cavity by providing an etchant through the through hole, wherein the stopper is in contact with the cavity.

Dependencies are inferred from the claim text.