B81C 1/00619
Forming high aspect ratio structures having deep steep walls
Official title: {Forming high aspect ratio structures having deep steep walls}
B81C1/00619 (Forming high aspect ratio structures having deep steep walls) appears on 183 US grants and 181 published applications in this corpus.
Search patents in B81C- Granted patents
- 183
- Published applications
- 181
- Assignees
- 102
- Inventors
- 399
- Latest grant
- 16 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1993 | 1 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 1 | 0 |
| 1997 | 0 | 0 |
| 1998 | 4 | 0 |
| 1999 | 0 | 0 |
| 2000 | 3 | 0 |
| 2001 | 5 | 1 |
| 2002 | 1 | 3 |
| 2003 | 5 | 4 |
| 2004 | 5 | 10 |
| 2005 | 4 | 10 |
| 2006 | 5 | 4 |
| 2007 | 6 | 3 |
| 2008 | 3 | 3 |
| 2009 | 3 | 2 |
| 2010 | 4 | 5 |
| 2011 | 5 | 16 |
| 2012 | 3 | 2 |
| 2013 | 4 | 10 |
| 2014 | 13 | 10 |
| 2015 | 9 | 11 |
| 2016 | 10 | 19 |
| 2017 | 18 | 12 |
| 2018 | 16 | 15 |
| 2019 | 13 | 9 |
| 2020 | 10 | 11 |
| 2021 | 14 | 7 |
| 2022 | 6 | 2 |
| 2023 | 1 | 3 |
| 2024 | 4 | 3 |
| 2025 | 4 | 2 |
| 2026 | 2 | 4 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Method for producing a microelectromechanical component16 Jun 2026US 12,655,018 B2Robert Bosch GmbH
- Method for producing at least one first and one second micromirror device10 Mar 2026US 12,570,522 B2Robert Bosch GmbH
- Etching method11 Nov 2025US 12,469,711 B2Ulvac, Inc.
- Micromechanical component and method for producing same14 Oct 2025US 12,441,607 B2Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
- Fabrication of MEMS structures from fused silica for inertial sensors8 Jul 2025US 12,351,451 B2Atlantic Inertial Systems Limited
- Method for manufacturing microstructures6 Aug 2026US 2026/0231708 A1Commissariat A L' Energie Atomique Et Aux Energies Alternatives
- Method for producing a micromechanical layer structure with high aspect ratio and micromechanical layer structure21 May 2026US 2026/0138867 A1
- Method and device for producing nanopores30 Apr 2026US 2026/0116742 A1The University of Tokyo
- Micromechanical comb structure made of glass, and associated method of use1 Jan 2026US 2026/0001808 A1Lpkf Laser & Electronics AG
- Process for producing a plurality of mems transducers with elevated performance capability20 Nov 2025US 2025/0358579 A1Hahn-Schickard-Gesellschaft FüR Angewandte Forschung E. V.
Most cited
By later US patents
- Method of anisotropically etching silicon679US 5,501,893 ARobert Bosch GmbH · 1996
- Microelectromechanical accelerometer for automotive applications205US 6,199,874 B1Cornell Research Foundation, Inc. · 2001
- Microstructures and single mask, single-crystal process for fabrication thereof160US 5,719,073 ACornell Research Foundation, Inc. · 1998
- Electrically isolated released microstructures133US 5,847,454 ACornell Research Foundcatton, Inc. · 1998
- Micromechanical accelerometer for automotive applications131US 6,170,332 B2Cornell Research Foundation, Inc. · 2001