Micromechanical component and method for producing same
AssigneeFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
InventorsRoman Forke, Karla Hiller
Life of this patent
Estimating the term…
Loading patent…
AssigneeFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
InventorsRoman Forke, Karla Hiller
Estimating the term…
A component for a micromechanical system has an upper side and a lower side disposed opposite the upper side and includes at least one first structural element that is arranged in a first region of the component and bounded by at least one first gap and at least one second structural element that is arranged in a second region of the component different from the first region and bounded by at least one second gap. The first region includes a first cutout in the lower side of the component, wherein a first thickness of the component in the first region is reduced in the second region with respect to a second thickness of the component. A minimal second gap width of the at least one second gap is larger than a minimal first gap width of the at least one first gap.
A component for a micromechanical system having an upper side and a lower side opposite the upper side, the component comprising:
Dependencies are inferred from the claim text.