B81C 1/00595
Control etch selectivity
Official title: {Control etch selectivity}
B81C1/00595 (Control etch selectivity) appears on 130 US grants and 132 published applications in this corpus.
Search patents in B81C- Granted patents
- 130
- Published applications
- 132
- Assignees
- 83
- Inventors
- 306
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1995 | 1 | 0 |
| 1996 | 2 | 0 |
| 1997 | 2 | 0 |
| 1998 | 3 | 0 |
| 1999 | 1 | 0 |
| 2000 | 1 | 0 |
| 2001 | 3 | 1 |
| 2002 | 0 | 7 |
| 2003 | 3 | 3 |
| 2004 | 6 | 6 |
| 2005 | 5 | 7 |
| 2006 | 6 | 7 |
| 2007 | 5 | 9 |
| 2008 | 3 | 9 |
| 2009 | 6 | 5 |
| 2010 | 4 | 9 |
| 2011 | 5 | 1 |
| 2012 | 8 | 4 |
| 2013 | 2 | 2 |
| 2014 | 4 | 5 |
| 2015 | 4 | 5 |
| 2016 | 5 | 10 |
| 2017 | 8 | 5 |
| 2018 | 6 | 5 |
| 2019 | 6 | 4 |
| 2020 | 7 | 7 |
| 2021 | 7 | 8 |
| 2022 | 4 | 3 |
| 2023 | 3 | 2 |
| 2024 | 5 | 3 |
| 2025 | 2 | 2 |
| 2026 | 3 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Engineered substrates, free-standing semiconductor microstructures, and related systems and methods6 Oct 2026US 12,753,068 B2Lawrence Semiconductor Research Laboratory, Inc.
- Method for machining a workpiece17 Mar 2026US 12,576,460 B2TRUMPF Laser- und Systemtechnik GmbH
- MEMS and NEMS structures13 Jan 2026US 12,522,498 B2Obsidian Sensors, Inc.
- Method of surface structuring a substrate body and substrate body2 Dec 2025US 12,486,197 B2Schott AG
- Sealed force sensor with etch stop layer17 Jun 2025US 12,332,127 B2NextInput, Inc.
- Method for producing a microelectromechanical device comprising a cap structure and a microelectromechanical device8 Oct 2026US 2026/0307983 A1
- Mems and nems structures23 Apr 2026US 2026/0109596 A1Obsidian Sensors, Inc.
- Method of surface structuring a substrate body and substrate body26 Feb 2026US 2026/0055023 A1Schott AG
- Laser micromachining of mems resonators from bulk optically transparent material20 Mar 2025US 2025/0091861 A1The Regents of the University of California
- Mems and nems structures6 Feb 2025US 2025/0042727 A1Obsidian Sensors, Inc.
Most cited
By later US patents
- Accelerometer sensor of crystalline material and method for manufacturing the same160US 5,578,755 ARobert Bosch GmbH · 1996
- Fabrication of a surface micromachined capacitive microphone using a dry-etch process97US 5,573,679 AAlberta Microelectronic Centre · 1996
- Method of forming a microstructure97US 5,804,083 ASharp Kabushiki Kaisha · 1998
- Fluoride gas etching of silicon with improved selectivity90US 6,290,864 B1Reflectivity, INC · 2001
- Silicon etching process for making microchannel plates84US 5,997,713 ANanoSciences Corporation · 1999