Method for machining a workpiece
AssigneeTRUMPF Laser- und Systemtechnik GmbH
InventorsMalte Kumkar, Myriam Kaiser
Life of this patent
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Abstract
The present invention relates to a method for machining a workpiece, comprising the steps of introducing a plurality of adjacent modifications into the material of the workpiece by means of laser radiation, etching the material of the workpiece in a first etching operation with a first selectivity, in order to remove predominantly the material modified by the laser radiation, and, after completion of the first etching operation, etching the material of the workpiece in a second etching operation with a second selectivity, different from the first selectivity, in order to remove the webs left between the removed modified material.
Claims9
A method for machining a workpiece, the method comprising:
- introducing a plurality of adjacent modifications into a material of the workpiece by laser radiation, the plurality of adjacent modifications being distributed over a volume of the material of the workpiece,
- etching the material of the workpiece in a first etching operation with a first selectivity, in order to remove predominantly the material modified by the laser radiation, and
- after completion of the first etching operation, etching the material of the workpiece in a second etching operation with a second selectivity different from the first selectivity, in order to remove webs left in the volume between the removed modified material,
- wherein at least some of the plurality of adjacent modifications introduced into the material of the workpiece have different lengths in a direction of propagation of the laser radiation so that, after completion of the first etching operation, a plurality of adjacent blind holes are created, and after completion of the second etching operation, the webs left between the adjacent blind holes are removed.
A method for machining a workpiece, the method comprising:
- introducing a plurality of adjacent modifications into a material of the workpiece by laser radiation, the plurality of adjacent modifications being distributed over a volume of the material of the workpiece,
- etching the material of the workpiece in a first etching operation with a first selectivity, in order to remove predominantly the material modified by the laser radiation, and
- after completion of the first etching operation, etching the material of the workpiece in a second etching operation with a second selectivity different from the first selectivity, in order to remove webs left in the volume between the removed modified material,
- wherein at least some of the plurality of adjacent modifications introduced into the material of the workpiece have different lengths in a direction of propagation of the laser radiation so that, after completion of the second etching operation, an hourglass-shaped through hole is formed in the workpiece.
Dependencies are inferred from the claim text.