Method of forming a microstructure
AssigneeSharp Kabushiki Kaisha
InventorsYorishige Ishii, Tetsuya Inui, Hirotsugu Matoba, Susumu Hirata, Masaharu Kimura, Hajime Horinaka, Shingo Abe, Hiroshi Onda
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Abstract
Method of forming a complex, minute three-dimensional structure, known as micromachining, which includes forming a plurality of thin films at least one of which is provided as a temporary layer composed of a lower layer made of an organic material and an upper layer made of an amphoteric metal material which is formed on the lower layer; and selectively removing the temporary layer to provide a three-dimensional structure. The temporary layer may comprise a composite sacrificial layer of photoresist and aluminum.
Claims19
A method of forming a microstructure for the production of a minute part with a composite structure, said method comprising the steps of:
- forming a plurality of layers as thin films;
- and
- selectively removing at least one of the plurality of layers as a temporary layer,
- wherein the temporary layer is formed as a composite of a lower layer composed of an organic material and an upper layer composed of an amphoteric material which is formed on the lower layer.
A method of forming a microstructure for the production of a minute part with a composite structure said method comprising the steps of:
- forming a plurality of layers as thin films;
- and
- selectively removing at least one of the plurality of layers as a temporary layer.
- wherein the temporary layer is formed as a composite of a lower layer composed of an organic material and an upper layer composed of an amphoteric material which is formed on the lower layer, and
- wherein the upper layer is formed on the lower layer through evaporation while maintaining the lower layer at a temperature lower than the deformation temperature of the organic material.
A method of forming a microstructure for the production of a minute part with a composite structure, said method comprising the steps of:
- forming a plurality of layers as thin films wherein one of the plurality of layers is an upper temporary layer formed on a second of the plurality of layers which is a lower temporary layer, said upper temporary layer and said lower temporary layer defining a temporary layer pair;
- and
- removing the upper temporary layer and the lower temporary layer,
- wherein the lower temporary layer is composed of an organic material and the upper temporary layer is composed of an amphoteric material,
- wherein the upper temporary layer and the lower temporary layer each occupies a volume which, when vacated by said removing step, at least partially defines a shape of said minute part.
Dependencies are inferred from the claim text.