B81B 3/0072
For controlling internal stress or strain in moving or flexible elements
Official title: {For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers}
B81B3/0072 (For controlling internal stress or strain in moving or flexible elements) appears on 525 US grants and 622 published applications in this corpus.
Search patents in B81B- Granted patents
- 525
- Published applications
- 622
- Assignees
- 246
- Inventors
- 1,179
- Latest grant
- 8 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1991 | 1 | 0 |
| 1992 | 1 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 1 | 0 |
| 1997 | 3 | 0 |
| 1998 | 2 | 0 |
| 1999 | 4 | 0 |
| 2000 | 3 | 0 |
| 2001 | 3 | 4 |
| 2002 | 4 | 12 |
| 2003 | 10 | 9 |
| 2004 | 14 | 12 |
| 2005 | 7 | 12 |
| 2006 | 17 | 18 |
| 2007 | 9 | 28 |
| 2008 | 9 | 12 |
| 2009 | 12 | 20 |
| 2010 | 18 | 21 |
| 2011 | 13 | 20 |
| 2012 | 18 | 25 |
| 2013 | 23 | 30 |
| 2014 | 26 | 28 |
| 2015 | 24 | 35 |
| 2016 | 26 | 27 |
| 2017 | 28 | 32 |
| 2018 | 35 | 47 |
| 2019 | 33 | 34 |
| 2020 | 35 | 26 |
| 2021 | 22 | 28 |
| 2022 | 24 | 24 |
| 2023 | 27 | 39 |
| 2024 | 30 | 34 |
| 2025 | 27 | 24 |
| 2026 | 15 | 21 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Anchor structure8 Sep 2026US 12,729,107 B2Lawrence Semiconductor Research Laboratory, Inc.
- Micro-electro-mechanical system device1 Sep 2026US 12,722,968 B2Vanguard International Semiconductor Corporation
- Device with a stress decoupling structure18 Aug 2026US 12,709,538 B2Infineon Technologies AG
- Drive and sense stress relief apparatus11 Aug 2026US 12,704,373 B2Analog Devices, Inc.
- Decoupling method for semiconductor device23 Jun 2026US 12,662,371 B2STMicroelectronics International N. V.
- Anchor structure1 Oct 2026US 2026/0296876 A1Lawrence Semiconductor Research Laboratory, Inc.
- Mems bridge24 Sep 2026US 2026/0290715 A1Sofant Technologies Ltd
- Method for producing a microstructural element and microstructural element10 Sep 2026US 2026/0265049 A1Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
- Micro-electro mechanical system microphone30 Jul 2026US 2026/0217521 A1AAC Technologies PTE.Ltd.
- Dual micro-electro mechanical system and manufacturing method thereof23 Jul 2026US 2026/0209033 A1Taiwan Semiconductor Manufacturing Company.Ltd
Most cited
By later US patents
- Support post architecture for micromechanical devices340US 6,447,126 B1Texas Instruments Incorporated · 2002
- Support post architecture for micromechanical devices283US 5,650,881 ATexas Instruments Incorporated · 1997
- Design and fabrication of broadband surface-micromachined micro-electro-mechanical switches for microwave and millimeter-wave applications270US 6,046,659 AHughes Electronics Corporation · 2000
- Miniature silicon condenser microphone268US 5,870,482 AKnowles Electronics, LLC · 1999
- Method of making a support post for a micromechanical device252US 5,784,212 ATexas Instruments Incorporated · 1998