Micro-electro mechanical system microphone

Abstract

An MEMS microphone comprises a substrate comprising a back cavity, a back plate fixed to the substrate, and a diaphragm arranged therebetween along a thickness direction of the substrate. The diaphragm comprises a vibration main section comprising an inner region, an outer region and a plurality of connecting portions spaced apart along a circumference direction of the diaphragm. The inner region is suspended above the back cavity. The outer region is fixedly connected to the substrate. The connecting portion is suspended above the substrate. Along a radial direction of the diaphragm, two ends of the connecting portion are fixedly connected to the inner region and the outer region. A width of the connecting portion decreases along a direction from the inner region towards the outer region. The MEMS microphone reduces improves the sensitivity of the MEMS microphone, and the stress on the connecting portion is evenly distributed.

Dependencies are inferred from the claim text.