Micro-electro-mechanical system device
AssigneeVanguard International Semiconductor Corporation
InventorJia Jie Xia
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Abstract
A MEMS device includes a substrate having a cavity, and a MEMS structure disposed over the cavity and attached to the substrate. The MEMS structure includes a plurality of cantilever portions, where each cantilever portions includes a free end and an anchor end. The MEMS device further includes a membrane disposed over the MEMS structure and includes a plurality of protruding portions respectively connected to the free ends of the cantilever portions. In addition, the MEMS device includes a gap between the MEMS structure and the membrane, where the gap surrounds the protruding portions.
Claims20
A micro-electro-mechanical system (MEMS) device, comprising:
- a substrate having a cavity;
- a MEMS structure disposed over the cavity and attached to the substrate, wherein the MEMS structure comprises a plurality of cantilever portions, and each of the plurality of cantilever portions comprises a free end and an anchor end;
- a membrane disposed over the MEMS structure, wherein the membrane comprises a plurality of protruding portions respectively connected to the free ends of the plurality of cantilever portions;
- and
- a gap disposed between the MEMS structure and the membrane, wherein the gap surrounds the plurality of protruding portions,
- wherein two anchor ends of two of the plurality of cantilever portions are attached to a portion of the substrate, and an interrupted portion penetrating the MEMS structure is disposed directly above the portion of the substrate.
Dependencies are inferred from the claim text.