Drive and sense stress relief apparatus
AssigneeAnalog Devices, Inc.
InventorGaurav Vohra
Life of this patent
Estimating the term…
Abstract
A MEMS device is provided comprising a mass configured to move along a first axis and a second axis substantially perpendicular to the first axis; a drive structure coupled to the mass and configured to cause the mass to move along the first axis; a sense structure coupled to the mass and configured to detect motion of the mass along the second axis; a stress relief structure coupled to one of the drive structure or the sense structure; and at least one anchor coupled to an underlying substrate of the MEMS device, wherein the stress relief structure is coupled to the at least one anchor and the at least one anchor is disposed outside of the stress relief structure.
Claims20
A microelectromechanical systems (MEMS) device comprising:
- a mass coupled to an underlying substrate of the MEMS device, the mass being configured to move along a first axis;
- a drive structure and a sense structure, wherein:
- the drive structure is coupled to the mass and configured to move along the first axis, wherein movement of the drive structure along the first axis causes movement of the mass along the first axis;
- and
- the sense structure is coupled to the mass and configured to detect motion of the mass along a second axis perpendicular to the first axis;
- and
- a first coupler coupling the mass to the drive structure, the first coupler comprising a first anchor coupled to the underlying substrate, a first lever coupling the mass to the first anchor, and a first arm attaching the first anchor to the drive structure, wherein the MEMS device comprises at least two pivot points about the first anchor including a first pivot point where the first lever couples to the first anchor.
A microelectromechanical systems (MEMS) device comprising:
- a mass coupled to an underlying substrate of the MEMS device, the mass being configured to move along a first axis;
- a drive structure
- coupled to the mass and configured to move along the first axis, wherein movement of the drive structure along the first axis causes movement of the mass along the first axis;
- a sense structure coupled to the mass and configured to detect motion of the mass along a second axis perpendicular to the first axis;
- and
- a first coupler coupling the mass to the drive structure, the first coupler comprising a first anchor coupled to the underlying substrate, a first lever coupling the mass to the first anchor, and a first arm attaching the first anchor to the drive structure, wherein the MEMS device comprises a plurality of connections to the first anchor, the plurality of connections being disposed symmetrically about the first anchor, wherein the MEMS device further comprises a first pivot point where the first lever couples to the first anchor.
Dependencies are inferred from the claim text.