H10P 95/405
Using cavities formed by hydrogen or noble gas ion implantation
Official title: {using cavities formed by hydrogen or noble gas ion implantation}
H10P95/405 (Using cavities formed by hydrogen or noble gas ion implantation) appears on 71 US grants and 75 published applications in this corpus.
Search patents in H10P- Granted patents
- 71
- Published applications
- 75
- Assignees
- 45
- Inventors
- 174
- Latest grant
- 9 Sep 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 1 | 0 |
| 1998 | 3 | 0 |
| 1999 | 1 | 0 |
| 2000 | 1 | 0 |
| 2001 | 2 | 1 |
| 2002 | 1 | 2 |
| 2003 | 1 | 2 |
| 2004 | 2 | 2 |
| 2005 | 2 | 4 |
| 2006 | 2 | 2 |
| 2007 | 0 | 6 |
| 2008 | 5 | 2 |
| 2009 | 2 | 2 |
| 2010 | 2 | 1 |
| 2011 | 1 | 3 |
| 2012 | 1 | 0 |
| 2013 | 3 | 2 |
| 2014 | 3 | 1 |
| 2015 | 1 | 8 |
| 2016 | 8 | 12 |
| 2017 | 6 | 3 |
| 2018 | 3 | 3 |
| 2019 | 5 | 3 |
| 2020 | 2 | 3 |
| 2021 | 4 | 4 |
| 2022 | 0 | 4 |
| 2023 | 3 | 2 |
| 2024 | 3 | 0 |
| 2025 | 2 | 3 |
By publication year. Applications have been published since 2001.
Recent patents
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- Structure for a front-facing image sensor9 Jan 2025US 2025/0015122 A1Soitec
- Semiconductor substrates and methods of producing the same7 Dec 2023US 2023/0395376 A1Imec Vzw
- Semiconductor epitaxial wafer and method of producing semiconductor epitaxial wafer, and method of producing solid-state imaging device6 Jul 2023US 2023/0215730 A1Sumco Corporation
Most cited
By later US patents
- Method for producing semiconductor substrate513US 5,854,123 ACanon Kabushiki Kaisha · 1998
- Gettering technique for silicon-on-insulator wafers155US 6,083,324 ASilicon Genesis Corporation · 2000
- Anisotropic gap etch129US 9,502,258 B2APPLIED Materials.Inc. · 2016
- Method of making silicon material with enhanced surface mobility by hydrogen ion implantation124US 5,198,371 ABiota Corp. · 1993
- Gettering technique for wafers made using a controlled cleaving process84US 6,548,382 B1Silicon Genesis Corporation · 2003