Structure for a front-facing image sensor
AssigneeSoitec
InventorsWalter Schwarzenbach, Ludovic Ecarnot, Damien Massy, Nadia Ben Mohamed, Nicolas Daval, Christophe Girard, Christophe Maleville
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AssigneeSoitec
InventorsWalter Schwarzenbach, Ludovic Ecarnot, Damien Massy, Nadia Ben Mohamed, Nicolas Daval, Christophe Girard, Christophe Maleville
Estimating the term…
A structure for a front-side image sensor comprises a semiconductor substrate, an electrically insulating layer overlying the semiconductor substrate, and an active layer overlying the electrically insulating layer. The semiconductor substrate comprises a trapping layer, the trapping layer including cavities therein. The structure further comprises a plurality of electrically isolating trenches extending vertically through the active layer to the electrically insulating layer. The plurality of electrically isolating trenches define a plurality of pixels. Also disclosed is a structure comprises a carrier substrate, an electrically insulating layer overlying the carrier substrate and a trapping layer, and a semiconductive layer overlying the electrically insulating layer. The trapping layer comprises cavities therein. The structure further comprises a plurality of electrically isolating trenches extending vertically through the semiconductive layer to the electrically insulating layer.
A structure for a front-side image sensor, comprising:
A structure, comprising:
Dependencies are inferred from the claim text.