H10P 72/3402
Mechanical parts of transfer devices
Official title: {Mechanical parts of transfer devices}
H10P72/3402 (Mechanical parts of transfer devices) appears on 1,025 US grants and 1,284 published applications in this corpus.
Search patents in H10P- Granted patents
- 1,025
- Published applications
- 1,284
- Assignees
- 329
- Inventors
- 2,359
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 1 | 0 |
| 1978 | 1 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 2 | 0 |
| 1985 | 1 | 0 |
| 1986 | 1 | 0 |
| 1987 | 7 | 0 |
| 1988 | 6 | 0 |
| 1989 | 6 | 0 |
| 1990 | 5 | 0 |
| 1991 | 2 | 0 |
| 1992 | 3 | 0 |
| 1993 | 6 | 0 |
| 1994 | 6 | 0 |
| 1995 | 3 | 0 |
| 1996 | 4 | 0 |
| 1997 | 4 | 0 |
| 1998 | 8 | 0 |
| 1999 | 9 | 0 |
| 2000 | 10 | 0 |
| 2001 | 9 | 8 |
| 2002 | 20 | 19 |
| 2003 | 16 | 26 |
| 2004 | 17 | 24 |
| 2005 | 14 | 21 |
| 2006 | 16 | 26 |
| 2007 | 15 | 28 |
| 2008 | 10 | 33 |
| 2009 | 10 | 30 |
| 2010 | 19 | 29 |
| 2011 | 20 | 31 |
| 2012 | 19 | 28 |
| 2013 | 25 | 43 |
| 2014 | 32 | 41 |
| 2015 | 43 | 39 |
| 2016 | 35 | 41 |
| 2017 | 26 | 38 |
| 2018 | 45 | 68 |
| 2019 | 63 | 72 |
| 2020 | 59 | 101 |
| 2021 | 62 | 87 |
| 2022 | 76 | 89 |
| 2023 | 75 | 118 |
| 2024 | 74 | 84 |
| 2025 | 87 | 103 |
| 2026 | 52 | 57 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Optically activated object mass transfer using multiple optical energy sources29 Sep 2026US 12,751,252 B2Genesee Valley Innovations, LLC
- Substrate handling device with vertical and horizontal rails for cleaning modules8 Sep 2026US 12,728,540 B2APPLIED Materials.Inc.
- Apparatus for treating substrate and method for treating substrate8 Sep 2026US 12,733,439 B2Semes Co., Ltd.
- Substrate processing system and condition monitoring method25 Aug 2026US 12,721,098 B2Tokyo Electron Limited
- Surface profiling and texturing of chamber components18 Aug 2026US 12,713,846 B2APPLIED Materials.Inc.
- Transfer robot8 Oct 2026US 2026/0307918 A1Kabushiki Kaisha Yaskawa Denki
- Semiconductor Thermal Processing Apparatus and Method for Transferring Workpieces by Carrier Device Thereof8 Oct 2026US 2026/0314307 A1Beijing Naura Microelectronics Equipment Co., Ltd.
- Operation method and device for cleaning foup8 Oct 2026US 2026/0314317 A1Asia Neo Tech Industrial Co., Ltd.
- Substrate processing apparatus and substrate processing method1 Oct 2026US 2026/0305239 A1SCREEN Holdings Co., Ltd.
- Systems and methods for tray cassette warehousing24 Sep 2026US 2026/0293595 A1Taiwan Semiconductor Manufacturing Company.Ltd
Most cited
By later US patents
- Modular wafer transport and processing system655US 4,917,556 AVarian Associates, Inc. · 1990
- Method and apparatus for batch processing a semiconductor wafer605US 5,167,716 AGaSonics, Inc. · 1992
- Wafer transfer mechanism548US 6,305,898 B1ASM Japan K .K. · 2001
- Robot hand and robot534US 8,720,965 B2Kabushiki Kaisha Yaskawa Denki · 2014
- Suction structure, robot hand and robot532US 8,991,887 B2Kabushiki Kaisha Yaskawa Denki · 2015