Systems and methods for tray cassette warehousing

A system comprising

• a semiconductor processing unit;
• an Automated Materials Handling System (AMHS) vehicle;
• and
• a warehouse apparatus comprising:
• a storage zone including at least one input port and at least one output port;
• an exchange zone including at least one load/unload port;
• a tray cassette robotic arm comprising an end effector;
• and
• a tray feeder conveyor connected to the at least one load/unload port,
• wherein the end effector comprises a lower surface configured to slide under a bottom wall of a tray cassette and side gates configured to laterally support the tray cassette.

A method, comprising:

• receiving a tray cassette container at an input port of a warehouse apparatus;
• separating a tray cassette from the tray cassette container;
• transporting the tray cassette from the input port to a load/unload port of the warehouse apparatus using a tray cassette robotic arm;
• removing a top tray from the tray cassette using a clamp fixed on a linear transfer mechanism;
• shifting remaining trays in the tray cassette upward;
• securing a second tray from a bottom of the tray cassette by shifting lock pins from relax positions to lock positions;
• lifting the second tray from the bottom;
• and
• pushing a bottom tray out to a tray feeder conveyor.