H10P 72/1906
Specially adapted for containing masks, reticles or pellicles
Official title: {specially adapted for containing masks, reticles or pellicles}
H10P72/1906 (Specially adapted for containing masks, reticles or pellicles) appears on 206 US grants and 262 published applications in this corpus.
Search patents in H10P- Granted patents
- 206
- Published applications
- 262
- Assignees
- 67
- Inventors
- 378
- Latest grant
- 22 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1983 | 1 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 1 | 0 |
| 1989 | 2 | 0 |
| 1990 | 1 | 0 |
| 1991 | 2 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 3 | 0 |
| 1995 | 0 | 0 |
| 1996 | 1 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 3 | 2 |
| 2002 | 2 | 3 |
| 2003 | 4 | 4 |
| 2004 | 5 | 5 |
| 2005 | 2 | 6 |
| 2006 | 1 | 9 |
| 2007 | 5 | 7 |
| 2008 | 8 | 11 |
| 2009 | 4 | 17 |
| 2010 | 9 | 8 |
| 2011 | 5 | 5 |
| 2012 | 6 | 11 |
| 2013 | 8 | 5 |
| 2014 | 3 | 8 |
| 2015 | 4 | 4 |
| 2016 | 7 | 6 |
| 2017 | 6 | 4 |
| 2018 | 7 | 10 |
| 2019 | 5 | 9 |
| 2020 | 11 | 18 |
| 2021 | 11 | 23 |
| 2022 | 13 | 19 |
| 2023 | 12 | 25 |
| 2024 | 16 | 14 |
| 2025 | 23 | 18 |
| 2026 | 14 | 11 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Reticle-like sensing assembly22 Sep 2026US 12,743,018 B2Microprogram Information Co., Ltd.
- Photomask box carrying device11 Aug 2026US 12,707,927 B2Gudeng Equipment Co., Ltd.
- Reticle pod having coated sensor zones4 Aug 2026US 12,701,958 B2Entegris, Inc.
- Reticle pod having anti-collision gap structure14 Jul 2026US 12,685,077 B2Gudeng Precision Industrial Co., Ltd.
- Reticle container with directed purge flow16 Jun 2026US 12,656,674 B2Entegris, Inc.
- Vacuum load ports, vacuum-compatible doors, and methods for transferring a reticle pod10 Sep 2026US 2026/0267239 A1Entegris, Inc.
- Orientable semiconductor container and orientation system for semiconductor container3 Sep 2026US 2026/0259513 A1Gudeng Precision Industrial Co., Ltd.
- A pod for a patterning device16 Jul 2026US 2026/0202737 A1ASML Netherlands B. V.
- Remote optimization of purge flow rates in a container2 Jul 2026US 2026/0190930 A1Entegris, Inc.
- Reticle pod having retention through reticle compartment wall18 Jun 2026US 2026/0169373 A1Entegris, Inc.
Most cited
By later US patents
- Reticle storage and retrieval system371US 6,562,094 B2PRI Automation, Inc. · 2003
- Substrate holding case75US 5,353,934 ADai Nippon Printing Co.Ltd. · 1994
- SMIF container including a reticle support structure74US 6,216,873 B1Asyst Technologies, Inc. · 2001
- Removable cover for protecting a reticle, system including and method of using the same51US 6,239,863 B1Silicon Valley Group, Inc. · 2001
- Container for housing a mask blank, method of housing a mask blank, and a mask blank package47US 8,496,133 B2Hoya Corporation · 2013