Photomask box carrying device

Abstract

A photomask box carrying device is applied to a target box with first standard or second standard. The photomask box carrying device includes a substrate, a base, a plurality of carrying components, a rotary component and a clamping component. The base is movably disposed on the substrate. The plurality of carrying components is disposed around the base and adapted to carry the target box. Position of the plurality of carrying components on the base correspond to an overlapped area of a first carrying area of the target box with the first standard and a second carrying area of the target box with the second standard. The rotary component is disposed under the base to adjust levelness of the base relative to the substrate. The clamping component is disposed on the substrate and adapted to abut a lateral side of the target box.

Dependencies are inferred from the claim text.