Vacuum load ports, vacuum-compatible doors, and methods for transferring a reticle pod
AssigneeEntegris, Inc.
InventorsTyler Monforton, Russ V. Raschke, Anthony M. Tieben, Brian Wiseman, Huaping Wang, Chet Steinhagen, Caleb Elwell
Life of this patent
Estimating the term…
Abstract
Described are systems, apparatus, and methods for moving a reticle from a first space at atmospheric pressure to a second space at vacuum pressure, the systems including a vacuum load port that includes a vacuum chamber between the first space and the second space; example methods include using a vacuum-compatible door that is capable of being held under vacuum in the vacuum chamber interior.
Claims13
A method of moving an inner reticle pod from a front space at atmospheric pressure into a rear space at vacuum pressure, the method comprising:
- enclosing the inner reticle pod and a vacuum-compatible outer pod door or a portion thereof in a vacuum chamber interior at atmospheric pressure;
- evacuating the vacuum chamber interior that contains the inner reticle pod and the vacuum-compatible outer pod door or portion thereof;
- and moving the inner reticle pod from the evacuated vacuum chamber interior into the space at vacuum pressure.
A vacuum-compatible door of an outer pod that comprises the vacuum-compatible door and a dome, wherein:
- the vacuum-compatible door comprises an upper surface adapted to support an inner reticle pod, and a bottom,
- the dome is adapted to cover the door to define an outer pod interior adapted to contain the inner reticle pod supported by the door,
- the vacuum-compatible door comprises a low-outgassing surface, and
- with the vacuum-compatible door held in a vacuum chamber, the vacuum chamber can be evacuated to reach a pressure below 0.1 Pascal within 5 minutes.
An outer pod comprising a vacuum-compatible door and a dome, the dome being adapted to cover the vacuum-compatible door to define an outer pod interior adapted to contain an inner reticle pod, the dome comprising a latching mechanism that comprises an actuator and moveable contact surface, the actuator being operatively coupled to the moveable contact surface to cause the moveable contact surface to be selectively moved between a retracted position and an extended position such that when the dome is placed on the vacuum-compatible door with the moveable contact surface in the retracted position, the actuator may be moved to cause the moveable contact surface to move to the extended position and engage the vacuum-compatible door to secure the vacuum-compatible door to the dome,
- wherein, with the vacuum-compatible door held in a vacuum chamber, the vacuum chamber can be evacuated to reach a pressure below 0.1 Pascal within 5 minutes.
Dependencies are inferred from the claim text.