SMIF container including a reticle support structure
AssigneeAsyst Technologies, Inc.
InventorsWilliam J. Fosnight, Raymond S. Martin, Joshua W. Shenk, Robert P. Wartenbergh
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AssigneeAsyst Technologies, Inc.
InventorsWilliam J. Fosnight, Raymond S. Martin, Joshua W. Shenk, Robert P. Wartenbergh
Estimating the term…
A reticle support mechanism is disclosed in which a reticle may be quickly and easily located and removed, and which is capable of securely supporting a reticle for storage and/or transport. A preferred embodiment of the present invention includes a pair of reticle supports mounted to a door of a container, and a pair of reticle retainers mounted to a shell of the container. When the container shell is coupled with the container door, sections of the reticle support and reticle retainer engage chamfered edges of the reticle and sandwich the reticle in a secure position within the container. As a result of engaging the reticle at its chamfered edges, potentially harmful contact with the upper and lower surfaces and vertical edges of the reticle is avoided.
A container for supporting a workpiece having four corners, the workpiece including a chamfer around upper and lower edges of the workpiece, the container including a door and a shell capable of coupling with the door to define an isolated environment within the container, the container comprising:
A container for supporting a reticle having four corners, the reticle including a chamfer around upper and lower edges of the reticle, the container including a door and a shell capable of coupling with the door to define an isolated environment within the container, the container comprising:
Dependencies are inferred from the claim text.