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US 12,743,018 B2Granted
Reticle-like sensing assembly
AssigneeMicroprogram Information Co., Ltd.
InventorTeng Yen Wu
Life of this patent
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Abstract
A reticle-like sensing assembly comprises a main body, a sensing module, a power supply and a wireless charging receiver. The main body has a space therein; wherein the main body has a dimension identical to the real reticle to collecting various data which affects a reticle in a lithography process. The sensing module is received in the space of the main body to sense information related to the main body and compute the information to obtain a sensing data accordingly. The power supply is received in the space of the main body and electrically connected to the sensing module to provide electric power to the sensing module. The wireless charging receiver is received in the space of the main body and electrically connected to the power supply to be driven to charge the power supply.
Claims18
A sensing assembly, comprising:
- a main body having a space therein;
- a sensing module received in the space of the main body to sense information related to the main body and compute the information to obtain a sensing data;
- a power supply received in the space of the main body and electrically connected to the sensing module to provide electric power to the sensing module;
- a wireless charging receiver received in the space of the main body and electrically connected to the power supply to be driven to charge the power supply;
- and
- a charging case having a charging space therein;
- wherein the main body is received in the charging space and the charging case has a wireless charger corresponded to the wireless charging receiver to drive the wireless charging receiver to charge the power supply;
- wherein the main body has a base and a cover;
- the base has a groove therein;
- the cover is engaged with a top of the groove, and the space is generated between the groove and the cover.
7 more elements
A sensing assembly, comprising:
- a main body having a space therein;
- a sensing module received in the space of the main body to sense at least an information related to the main body and compute the information to obtain a sensing data;
- a power supply received in the space of the main body and electrically connected to the sensing module to provide electric power to the sensing module;
- and
- a wireless charging receiver received in the space of the main body and electrically connected to the power supply to be driven to charge the power supply;
- wherein the main body has a base and a cover;
- the base has a groove therein;
- the cover is engaged with a top of the groove, and the space is generated between the groove and the cover.
5 more elements
A sensing assembly, comprising:
- a main body having a space therein;
- a sensing module received in the space of the main body to sense information related to the main body and compute the information to obtain a sensing data;
- a power supply received in the space of the main body and electrically connected to the sensing module to provide electric power to the sensing module;
- a wireless charging receiver received in the space of the main body and electrically connected to the power supply to be driven to charge the power supply;
- and
- a charging case having a charging space therein;
- wherein the main body is received in the charging space and the charging case has a wireless charger corresponded to the wireless charging receiver to drive the wireless charging receiver to charge the power supply;
- wherein the sensing module has a circuit board, a sensing unit and a computing unit;
- the sensing unit and the computing unit are mounted on the circuit board;
- the sensing unit is configured to collect the information and generate a sensing signal accordingly;
- the computing unit is configured to receive the sensing signal of the sensing unit and compute the sensing data accordingly;
- wherein the sensing unit comprises a balance sensor to collect a tilt level of the main body and generate a balance signal accordingly;
- the computing unit computes an angle changing value according to the balance signal from the balance sensor.
10 more elements
A sensing assembly, comprising:
- a main body having a space therein;
- a sensing module received in the space of the main body to sense at least an information related to the main body and compute the information to obtain a sensing data;
- a power supply received in the space of the main body and electrically connected to the sensing module to provide electric power to the sensing module;
- and
- a wireless charging receiver received in the space of the main body and electrically connected to the power supply to be driven to charge the power supply;
- wherein the sensing module has a circuit board, a sensing unit and a computing unit;
- the sensing unit and the computing unit are mounted on the circuit board;
- the sensing unit is configured to collect the information and generate a sensing signal accordingly;
- the computing unit is configured to receive the sensing signal of the sensing unit and compute the sensing data accordingly;
- wherein the sensing unit comprises a balance sensor to collect a tilt level of the main body and generate a balance signal accordingly;
- the computing unit computes an angle changing value according to the balance signal from the balance sensor.
8 more elements
Dependencies are inferred from the claim text.