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US 12,701,958 B2Granted
Reticle pod having coated sensor zones
AssigneeEntegris, Inc.
InventorsRuss V. Raschke, Huaping Wang
Life of this patent
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Abstract
Sensor zones are created on an inner pod of a reticle container using a dry coating method. The sensor zones are discrete zones having a specific spectral reflectivity. The sensor zones are positioned such that they can be read by a tool to determine distance of portions of the pod. The use of discrete zones and a dry coating method for applying those discrete zones overcomes issues with inconsistency and difficulty in cleaning or maintaining reflectance of an inner pod of the reticle container in comparison with inner pods plated entirely with material or other wet coating applied materials.
Claims10
A pod, comprising:
- a baseplate having a baseplate surface, the baseplate surface being outward-facing and including a baseplate surface material;
- a cover having a cover surface, the cover surface being an outward-facing and including a cover surface material;
- and
- one or more discrete sensor zones, each of the sensor zones including a reflective material, the one or more discrete sensor zones disposed on one or both of the baseplate surface and the cover surface,
- wherein when joined, the cover and the baseplate are configured to define an internal space to accommodate a reticle,
- wherein the discrete sensor zones cover less than the entirety of the baseplate surface and/or the cover surface, and
- wherein each of the one or more discrete sensor zones is formed by a dry coating process.
4 more elements
Dependencies are inferred from the claim text.