Reticle storage and retrieval system

A system for storing and retrieving items, comprising:

• an enclosed storage unit including,
• a movable storage matrix having a plurality of bays for storing the items,
• a base unit for mounting said movable storage matrix thereon, and
• a drive mechanism connected to said base unit;
• an enclosed retrieval unit separate from said storage unit, said retrieval unit including,
• a transfer unit for retrieving the items from said movable storage matrix, said transfer unit passing the items between said storage unit and said retrieval unit through an access passage of said storage unit,
• a drive motor connected to said drive mechanism for moving said movable storage matrix,
• a track for positioning said transfer unit to retrieve the items;
• a controller for controlling said drive motor and said transfer unit for positioning said movable storage matrix to retrieve and store the items;
• a staging area for staging the items to be transferred between the transfer unit and an area external to the system, and
• an air circulator for uniformly supplying a vertical flow of externally supplied filtered air to said storage unit and then exhausting the filtered air from said storage unit after being circulated therethrough;
• a hollow diffuser assembly centrally located within said storage matrix for receiving said vertical flow of filtered air therein and for generating a uniform horizontal flow of the filtered air to said plurality of bays for storing the items;
• and
• a plurality of air returns surrounding said storage matrix for counteracting asymmetric venting of the filtered air from said diffuser assembly.

A system for storing and retrieving reticles in a clean environment, comprising:

• an enclosed storage unit including,
• a cylindrical storage matrix having a plurality of bays for storing the reticles,
• a rotatable base unit for mounting said cylindrical storage matrix thereon, and
• a drive mechanism connected to said rotatable base unit;
• an enclosed retrieval unit separate from said storage unit, said retrieval unit including,
• a reticle transfer unit for retrieving the reticles from said cylindrical storage matrix, said reticle transfer unit passing the reticles between said storage unit and said retrieval unit through an access passage of said storage unit,
• a drive motor connected to said drive mechanism for rotating said cylindrical storage matrix,
• a track for positioning said reticle transfer unit to retrieve the reticles;
• a controller for controlling said drive motor and said reticle transfer unit for positioning said cylindrical storage matrix to retrieve and store the reticles;
• a staging area for staging the reticles to be transferred between the transfer unit and an area external to the system, and
• an air circulator for uniformly supplying a vertical flow of externally supplied filtered air to said storage unit and then exhausting the filtered air from said storage unit after being circulated therethrough;
• a hollow diffuser assembly centrally located within said storage matrix for receiving said vertical flow of filtered air therein and for generating a uniform horizontal flow of the filtered air to said plurality of bays for storing the reticles;
• and
• wherein said diffuser assembly comprises a plurality of wedge shaped columns which create parallel storage slots for said bays to maintain and uniformly channel the filtered air therethrough.

A system for storing and retrieving reticles in a clean environment comprising:

• an enclosed storage unit including,
• a cylindrical storage matrix having a plurality of bays for storing the reticles,
• a rotatable base unit for mounting said cylindrical storage matrix thereon, and
• a drive mechanism connected to said rotatable base unit;
• an enclosed retrieval unit separate from said storage unit, said retrieval unit including,
• a reticle transfer unit for retrieving the reticles from said cylindrical storage matrix, said reticle transfer unit passing the reticles between said storage unit and said retrieval unit through an access passage of said storage unit,
• a drive motor connected to said drive mechanism for rotating said cylindrical storage matrix,
• a track for positioning said reticle transfer unit to retrieve the reticles;
• a controller for controlling said drive motor and said reticle transfer unit for positioning said cylindrical storage matrix to retrieve and store the reticles;
• a staging area for staging the reticles to be transferred between the transfer unit and an area external to the system, and
• an air circulator for uniformly supplying a vertical flow of externally supplied filtered air to said storage unit and then exhausting the filtered air from said storage unit after being circulated therethrough;
• a hollow diffuser, assembly centrally located within said storage mans for receiving said vertical flow of filtered air therein and for generating a uniform horizontal flow of the filtered air to said plurality of bays for storing the reticles and
• a plurality of air returns surrounding said storage matrix for counteracting asymmetric venting of the filtered air from said diffuser assembly.

A system for storing and retrieving items in a clean environment, comprising:

• an enclosed storage unit including:
• a movable storage matrix having a plurality of bays
• each for storing a respective item, the bays disposed about a central core;
• and
• a base unit for mounting said movable storage matrix thereon;
• a motor drive external to the storage unit and coupled to said base unit for moving the movable storage matrix;
• an enclosed retrieval unit separate from said storage unit and including a transfer unit for retrieving the items from said movable storage matrix, said transfer unit passing the items between said storage unit and said retrieval unit through an access passage of said storage unit;
• an air circulator for supplying a flow of air to the core of said storage matrix and the air circulator exhausting from the storage unit the air received from said plurality of bays;
• and
• a hollow diffuser assembly disposed in fixed location within the core of said storage matrix adjacent the plurality of bays for receiving said flow of air and providing a uniform horizontal flow of air across said plurality of bays.

A system for storing and retrieving reticles in a clean environment, comprising:

• an enclosed storage unit including:
• a rotatable cylindrical storage matrix having a plurality of bays each for storing a respective reticle, the bays disposed about a central core;
• and
• a base unit for mounting said rotatable cylindrical storage matrix thereon;
• a motor drive external to the storage unit and coupled to said base unit for rotating the rotatable storage matrix;
• an enclosed retrieval unit separate from said storage unit and having a transfer unit for retrieving the reticles from said cylindrical storage matrix, said transfer unit passing the reticles between said storage unit and said retrieval unit through an access passage of said storage unit;
• an air circulator for supplying a flow of air to the core of said storage matrix and for the air circulator exhausting from the storage unit the air received from the plurality of bays;
• and
• a hollow diffuser assembly disposed in fixed location within the core of said storage matrix adjacent the plurality of bays for receiving said flow of air and providing a uniform horizontal flow of air across said plurality of bays.