Reticle container with directed purge flow
AssigneeEntegris, Inc.
InventorsRuss V. Raschke, Brian Wiseman
Life of this patent
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Abstract
A reticle container includes an outer pod and an inner pod, the inner pod configured to contain a reticle. The outer pod includes a pod door including a purge port, and a pod dome including one or more channels configured to receive a purge gas from the purge port and direct the purge gas to particular locations within the outer pod. The channels can direct the purge gas to one or more filters of the inner pod. The channels can direct the purge gas such that there is a pressure differential between the pressure at a first filter and the pressure at the second filter. The inner pod can include deflectors or channels to further direct the purge flow through the inner pod to purge the area surrounding the reticle.
Claims20
A reticle pod, comprising:
- an inner pod including a cover and a baseplate, wherein a plurality of filters are provided on the cover or the baseplate, the inner pod configured to accommodate a reticle;
- and
- an outer pod configured to accommodate the inner pod, the outer pod including:
- a pod door, the pod door including one or more purge inlets, and
- a pod dome,
- wherein at least one of the pod door and the pod dome including one or more channels each configured to direct flow from one of said at least one purge inlet to at least one of said plurality of filters, and
- wherein the one or more channels are configured to direct flow such that a first pressure at a first filter of the plurality of filters is greater than a second pressure at a second filter of the plurality of filters.
A reticle pod, comprising:
- an inner pod including a cover and a baseplate, wherein at least one filter is provided on the cover or the baseplate, the inner pod configured to accommodate a reticle;
- and
- an outer pod configured to accommodate the inner pod, the outer pod including:
- a pod door, the pod door including one or more purge inlets, and
- a pod dome,
- wherein the pod dome includes one or more channels, each configured to direct flow from one of said at least one purge inlet to one of said at least one filter, and
- wherein the pod dome includes a purge inlet interface for each of the one or more purge inlets included in the pod door, the purge inlet interface configured to direct flow from one of the purge inlets to at least one of the one or more channels.
Dependencies are inferred from the claim text.