H01J 37/3056
For microworking, e. g. etching of gratings or trimming of electrical components
Official title: {for microworking, e. g. etching of gratings or trimming of electrical components}
H01J37/3056 (For microworking, e. g. etching of gratings or trimming of electrical components) appears on 805 US grants and 836 published applications in this corpus.
Search patents in H01J- Granted patents
- 805
- Published applications
- 836
- Assignees
- 212
- Inventors
- 1,322
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 1 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 1 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 2 | 0 |
| 1985 | 0 | 0 |
| 1986 | 3 | 0 |
| 1987 | 5 | 0 |
| 1988 | 0 | 0 |
| 1989 | 5 | 0 |
| 1990 | 3 | 0 |
| 1991 | 5 | 0 |
| 1992 | 8 | 0 |
| 1993 | 4 | 0 |
| 1994 | 7 | 0 |
| 1995 | 5 | 0 |
| 1996 | 6 | 0 |
| 1997 | 8 | 0 |
| 1998 | 11 | 0 |
| 1999 | 8 | 0 |
| 2000 | 8 | 0 |
| 2001 | 12 | 7 |
| 2002 | 13 | 16 |
| 2003 | 18 | 22 |
| 2004 | 19 | 31 |
| 2005 | 28 | 34 |
| 2006 | 24 | 46 |
| 2007 | 24 | 49 |
| 2008 | 28 | 51 |
| 2009 | 50 | 37 |
| 2010 | 20 | 36 |
| 2011 | 30 | 30 |
| 2012 | 39 | 37 |
| 2013 | 34 | 35 |
| 2014 | 43 | 39 |
| 2015 | 34 | 46 |
| 2016 | 40 | 31 |
| 2017 | 35 | 19 |
| 2018 | 22 | 28 |
| 2019 | 35 | 38 |
| 2020 | 38 | 35 |
| 2021 | 31 | 27 |
| 2022 | 24 | 21 |
| 2023 | 24 | 30 |
| 2024 | 17 | 27 |
| 2025 | 16 | 34 |
| 2026 | 16 | 30 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- End point determination by means of contrast gas29 Sep 2026US 12,748,347 B2Carl Zeiss SMT GmbH
- Method and system for analyzing three-dimensional features22 Sep 2026US 12,744,180 B2FEI Company
- Focused ion beam device8 Sep 2026US 12,731,755 B2Hitachi High-Tech Science Corporation
- Air bearing shaft with wide operating temperature range11 Aug 2026US 12,706,271 B2APPLIED Materials.Inc.
- Controlling etch angles by substrate rotation in angled etch tools30 Jun 2026US 12,669,635 B2APPLIED Materials.Inc.
- Ion Milling Device3 Sep 2026US 2026/0260846 A1Hitachi High-Tech Corporation
- Ion Milling Device and Processing Method Using Same27 Aug 2026US 2026/0253837 A1Hitachi High-Tech Corporation
- Method for micromachining a biological sample for creating a lamella for analysis in a cryo-charged particle microscope27 Aug 2026US 2026/0253838 A1FEI Company
- Composite Beam Apparatus13 Aug 2026US 2026/0237598 A1Hitachi High-Tech Corporation
- Charged particle beam device and method for controlling charged particle beam device6 Aug 2026US 2026/0229452 A1Hitachi High-Tech Analysis Corporation
Most cited
By later US patents
- Method and apparatus for sample fabrication177US 6,538,254 B1Hitachi, Ltd. · 2003
- Precise metrology with adaptive milling154US 8,222,599 B1Western Digital (Fremont), LLC · 2012
- Method for separating specimen and method for analyzing the specimen separated by the specimen separating method131US 5,270,552 AHitachi, Ltd. · 1993
- Electron beam processing98US 6,753,538 B2FEI Company · 2004
- Lift-out probe having an extension tip, methods of making and using, and analytical instruments employing same98US 7,009,188 B2Micron Technology, Inc. · 2006