Method and apparatus for sample fabrication

A specimen fabrication apparatus comprising:

• a vacuum chamber;
• a movable sample stage provided in said vacuum chamber and used for mounting a specimen substrate;
• an ion-beam irradiating optical system for irradiating an ion beam to said specimen substrate;
• a deposition-gas supplying source for supplying raw-material gas for creation of a deposition film to an area on said specimen substrate to which said ion beam is irradiated;
• a sample stage actuator for moving the sample stage to a position where the specimen substrate is irradiated by the ion beam so as to separate a micro-specimen from the specimen substrate;
• a specimen transferring unit for transferring said micro-specimen separated from said specimen substrate by irradiation of said ion beam to a specimen holder provided in said vacuum chamber for observation of said micro-specimen;
• and
• a micro-specimen fixing means for fixing said micro-specimen transferred to said specimen holder by said specimen transferring unit to-said specimen holder;
• wherein said sample stage actuator enables moving of said specimen holder into an area of irradiation by said ion beam for fixing of said micro-specimen to said specimen holder by said micro-specimen fixing means.