Ion Milling Device

An ion milling device that irradiates a sample with an ion beam, the ion milling device comprising:

• a rotation stage configured to rotate about a rotational axis;
• a movable stage provided on an upper surface of the rotation stage and configured to move in a direction that is not parallel to the rotational axis;
• and
• a fixed base unit configured to support the rotation stage,
• wherein the rotation stage includes a first power transmission unit capable of transmitting power to the movable stage,
• wherein the fixed base unit includes a second power transmission unit supplied with power from a power supply,
• wherein the first power transmission unit and the second power transmission unit are configured to transmit the power supplied by the power supply to the movable stage by coming into contact with each other,
• wherein the ion milling device further comprises a contact maintenance member that maintains contact between the first power transmission unit and the second power transmission unit by exerting a force for pressing the first power transmission unit and the second power transmission unit against each other,
• wherein the ion milling device further comprises a sensor,
• wherein the sensor includes a first member attached to the fixed base unit and a second member attached to the rotation stage,
• wherein the second member rotates along with the rotation stage, and
• wherein the first member is supplied with power via the second power transmission unit to detect rotation of the second member.