Lift-out probe having an extension tip, methods of making and using, and analytical instruments employing same
AssigneeMicron Technology, Inc.
InventorShixin Wang
Life of this patent
Estimating the term…
Abstract
Extension tips for lift-out probes used in conjunction with focused ion beam (FIB) systems and analytical instruments employing such probes are disclosed. Methods of forming the extension tips from a variety of materials such as a silicon wafer, preformed whiskers of conductive material, and metal lines or contacts removed from integrated circuits are also disclosed. Methods of using a variety of extension tips pre-placed within the FIB system to enable reconditioning worn or damaged lift-out probes are also disclosed.
Claims38
A probe structure for use taking a sample from a larger body, the probe structure comprising:
- an elongated probe member sized and configured for use in a chamber of a focused ion beam system, the probe member having a front end region and a back end region;
- and
- an elongated extension tip having a proximal portion and a distal portion, the proximal portion being coupled to the front end region of the probe member.
A method of fabricating a probe structure, comprising:
- providing an elongated probe member sized and configured for use in a chamber of a focused ion beam system, and having a front end region defined by at least one lateral dimension and a back end region;
- relatively positioning a portion of a body having a smaller lateral dimension than the at least one lateral dimension of the elongated probe member to contact the front end region thereof;
- and
- bonding the front end region of the elongated probe member to the portion of the body.
A method of fabricating a probe structure, comprising:
- providing a plurality of extension tips of predetermined sizes and shapes, each extension tip of the plurality of extension tips having a proximal portion and a distal portion, inside a chamber of a focused ion beam system;
- orienting a selected extension tip of the plurality of extension tips relative to a lift-out probe disposed within the chamber to contact the lift-out probe;
- and
- bonding an end region of the lift-out probe to the proximal portion of the selected extension tip.
An analytical instrument comprising:
- a focused ion beam system;
- and
- a micromanipulator system comprising:
- a probe controller operably coupled to a probe structure for accessing a chamber of the focused ion beam system, the probe structure comprising:
- an elongated probe member having a front end region and a back end region;
- and
- an elongated extension tip having a proximal portion and a distal portion coupled by the proximal portion to the front end region of the elongated probe member.
A method of taking a sample from a workpiece using a lift-out probe, comprising:
- forming a lift-out probe structure including an elongated probe member sized and configured for use in a chamber of a focused ion beam system, and having an elongated extension tip bonded thereto;
- contacting a workpiece with a distal end of the elongated extension tip;
- bonding the distal end to the workpiece;
- and
- severing a portion of the workpiece bonded to the distal end from the workpiece.
Dependencies are inferred from the claim text.